JPS6135627B2 - - Google Patents
Info
- Publication number
- JPS6135627B2 JPS6135627B2 JP1666879A JP1666879A JPS6135627B2 JP S6135627 B2 JPS6135627 B2 JP S6135627B2 JP 1666879 A JP1666879 A JP 1666879A JP 1666879 A JP1666879 A JP 1666879A JP S6135627 B2 JPS6135627 B2 JP S6135627B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- detector
- magnetic
- pattern
- auxiliary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 28
- 239000004020 conductor Substances 0.000 claims description 27
- 238000005530 etching Methods 0.000 claims description 17
- 238000000992 sputter etching Methods 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 description 68
- 239000010931 gold Substances 0.000 description 21
- 239000010409 thin film Substances 0.000 description 14
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 5
- 239000002131 composite material Substances 0.000 description 5
- 239000000696 magnetic material Substances 0.000 description 5
- 229910000889 permalloy Inorganic materials 0.000 description 4
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 3
- 238000003486 chemical etching Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000002223 garnet Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- GYICFMAUMDNZTL-UHFFFAOYSA-N calcium germanium Chemical compound [Ca].[Ge] GYICFMAUMDNZTL-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 238000007737 ion beam deposition Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- NLKNQRATVPKPDG-UHFFFAOYSA-M potassium iodide Chemical compound [K+].[I-] NLKNQRATVPKPDG-UHFFFAOYSA-M 0.000 description 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1666879A JPS55108989A (en) | 1979-02-14 | 1979-02-14 | Production of magnetic detector |
| US06/036,983 US4302822A (en) | 1978-05-12 | 1979-05-08 | Thin-film magnetic bubble domain detection device and process for manufacturing the same |
| US06/266,105 US4390404A (en) | 1978-05-12 | 1981-05-21 | Process for manufacture of thin-film magnetic bubble domain detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1666879A JPS55108989A (en) | 1979-02-14 | 1979-02-14 | Production of magnetic detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55108989A JPS55108989A (en) | 1980-08-21 |
| JPS6135627B2 true JPS6135627B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-08-14 |
Family
ID=11922692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1666879A Granted JPS55108989A (en) | 1978-05-12 | 1979-02-14 | Production of magnetic detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55108989A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6074192A (ja) * | 1983-09-30 | 1985-04-26 | Fujitsu Ltd | バブルメモリ作成方法 |
-
1979
- 1979-02-14 JP JP1666879A patent/JPS55108989A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55108989A (en) | 1980-08-21 |
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