JPS55108989A - Production of magnetic detector - Google Patents
Production of magnetic detectorInfo
- Publication number
- JPS55108989A JPS55108989A JP1666879A JP1666879A JPS55108989A JP S55108989 A JPS55108989 A JP S55108989A JP 1666879 A JP1666879 A JP 1666879A JP 1666879 A JP1666879 A JP 1666879A JP S55108989 A JPS55108989 A JP S55108989A
- Authority
- JP
- Japan
- Prior art keywords
- film
- detector
- pattern
- auxiliary
- films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To produce a thin film magnetic detector with steps cancelled, by causing a soft magnetic material film and the second auxiliary film to adhere onto the substrate after removing the conductor film and the first auxiliary film on the substrate with masking and by removing the first and the second auxiliary films after forming the form of a detector.
CONSTITUTION: Al2O3 film 3, Al film 1 as a conductor film, and Au film 4 as an auxiliary film are caused to adhere onto a magnetic garnet in order by evaporation. Resistor pattern 2 is used as a mask to remove the Al/Au composite film of the detector part. Without exfoliation of pattern 2, auxiliary films of Permalloy thin film 5 and Au film 6 are caused to adhere onto pattern 2 as magnetism detecting soft magnetic material films by evaporation, and after evaporation adhesion, pattern 2 made larger than the detector form is lifted off, and thin film 5 and Au film 5 outside the detector region are removed. Next, a resistor pattern is formed, and Al film 1 and Au film 4 are formed into a conductor pattern form by oblique incident ion milling, and simultaneously, thin film 5 and Au film 6 are formed into the detector form by oblique incident ion milling. After that, the resistor is exfoliated, and Au films 4 and 6 are removed selectively.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1666879A JPS55108989A (en) | 1979-02-14 | 1979-02-14 | Production of magnetic detector |
US06/036,983 US4302822A (en) | 1978-05-12 | 1979-05-08 | Thin-film magnetic bubble domain detection device and process for manufacturing the same |
US06/266,105 US4390404A (en) | 1978-05-12 | 1981-05-21 | Process for manufacture of thin-film magnetic bubble domain detection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1666879A JPS55108989A (en) | 1979-02-14 | 1979-02-14 | Production of magnetic detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55108989A true JPS55108989A (en) | 1980-08-21 |
JPS6135627B2 JPS6135627B2 (en) | 1986-08-14 |
Family
ID=11922692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1666879A Granted JPS55108989A (en) | 1978-05-12 | 1979-02-14 | Production of magnetic detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55108989A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6074192A (en) * | 1983-09-30 | 1985-04-26 | Fujitsu Ltd | Method for forming bubble memory |
-
1979
- 1979-02-14 JP JP1666879A patent/JPS55108989A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6074192A (en) * | 1983-09-30 | 1985-04-26 | Fujitsu Ltd | Method for forming bubble memory |
Also Published As
Publication number | Publication date |
---|---|
JPS6135627B2 (en) | 1986-08-14 |
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