JPS55108989A - Production of magnetic detector - Google Patents

Production of magnetic detector

Info

Publication number
JPS55108989A
JPS55108989A JP1666879A JP1666879A JPS55108989A JP S55108989 A JPS55108989 A JP S55108989A JP 1666879 A JP1666879 A JP 1666879A JP 1666879 A JP1666879 A JP 1666879A JP S55108989 A JPS55108989 A JP S55108989A
Authority
JP
Japan
Prior art keywords
film
detector
pattern
auxiliary
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1666879A
Other languages
Japanese (ja)
Other versions
JPS6135627B2 (en
Inventor
Sotaro Edokoro
Hiroshi Gokan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP1666879A priority Critical patent/JPS55108989A/en
Priority to US06/036,983 priority patent/US4302822A/en
Publication of JPS55108989A publication Critical patent/JPS55108989A/en
Priority to US06/266,105 priority patent/US4390404A/en
Publication of JPS6135627B2 publication Critical patent/JPS6135627B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To produce a thin film magnetic detector with steps cancelled, by causing a soft magnetic material film and the second auxiliary film to adhere onto the substrate after removing the conductor film and the first auxiliary film on the substrate with masking and by removing the first and the second auxiliary films after forming the form of a detector.
CONSTITUTION: Al2O3 film 3, Al film 1 as a conductor film, and Au film 4 as an auxiliary film are caused to adhere onto a magnetic garnet in order by evaporation. Resistor pattern 2 is used as a mask to remove the Al/Au composite film of the detector part. Without exfoliation of pattern 2, auxiliary films of Permalloy thin film 5 and Au film 6 are caused to adhere onto pattern 2 as magnetism detecting soft magnetic material films by evaporation, and after evaporation adhesion, pattern 2 made larger than the detector form is lifted off, and thin film 5 and Au film 5 outside the detector region are removed. Next, a resistor pattern is formed, and Al film 1 and Au film 4 are formed into a conductor pattern form by oblique incident ion milling, and simultaneously, thin film 5 and Au film 6 are formed into the detector form by oblique incident ion milling. After that, the resistor is exfoliated, and Au films 4 and 6 are removed selectively.
COPYRIGHT: (C)1980,JPO&Japio
JP1666879A 1978-05-12 1979-02-14 Production of magnetic detector Granted JPS55108989A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP1666879A JPS55108989A (en) 1979-02-14 1979-02-14 Production of magnetic detector
US06/036,983 US4302822A (en) 1978-05-12 1979-05-08 Thin-film magnetic bubble domain detection device and process for manufacturing the same
US06/266,105 US4390404A (en) 1978-05-12 1981-05-21 Process for manufacture of thin-film magnetic bubble domain detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1666879A JPS55108989A (en) 1979-02-14 1979-02-14 Production of magnetic detector

Publications (2)

Publication Number Publication Date
JPS55108989A true JPS55108989A (en) 1980-08-21
JPS6135627B2 JPS6135627B2 (en) 1986-08-14

Family

ID=11922692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1666879A Granted JPS55108989A (en) 1978-05-12 1979-02-14 Production of magnetic detector

Country Status (1)

Country Link
JP (1) JPS55108989A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6074192A (en) * 1983-09-30 1985-04-26 Fujitsu Ltd Method for forming bubble memory

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6074192A (en) * 1983-09-30 1985-04-26 Fujitsu Ltd Method for forming bubble memory

Also Published As

Publication number Publication date
JPS6135627B2 (en) 1986-08-14

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