JPS55108988A - Production of magnetic detector - Google Patents

Production of magnetic detector

Info

Publication number
JPS55108988A
JPS55108988A JP1666779A JP1666779A JPS55108988A JP S55108988 A JPS55108988 A JP S55108988A JP 1666779 A JP1666779 A JP 1666779A JP 1666779 A JP1666779 A JP 1666779A JP S55108988 A JPS55108988 A JP S55108988A
Authority
JP
Japan
Prior art keywords
thin film
insulating film
detector
film
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1666779A
Other languages
Japanese (ja)
Other versions
JPS6135626B2 (en
Inventor
Sotaro Edokoro
Hiroshi Gokan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP1666779A priority Critical patent/JPS55108988A/en
Priority to US06/036,983 priority patent/US4302822A/en
Publication of JPS55108988A publication Critical patent/JPS55108988A/en
Priority to US06/266,105 priority patent/US4390404A/en
Publication of JPS6135626B2 publication Critical patent/JPS6135626B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To produce a thin film magnetic detector with steps cancelled, by causing a soft magnetic material thin film and an insulating film to adhere to the substrate after removing a conductor thin film on the substrate with masking and by causing the second insulating film to adhere to the substrate after forming a detector from with masking.
CONSTITUTION: Insulating film 3 and conductor thin film 1 are caused to adhere to a magnetic garnet by evaporation, and resistor pattern 2 is used as a mask to remove thin film 1 by dimensions larger than those of a detector form. Without removal of pattern 2, soft magnetic material thin film 4 and insulating film 5 are caused to adhere onto pattern 2 in order by evaporation, and after evaporation adhesion, pattern 2 is lifted off to remove thin film 4 and insulating film 5 outside the detector form region. Next, after a resistor pattern in formed, insulating film 5 is processed into the detector form, and next, conductor film 1 and thin film 4 are processed into the detector form by etching. Next, without exfoliation of the resistor, the second insulating film 6 is caused to adhere onto insulating film 3 with a thickness slightly smaller or larger than that of conductor film 1 and (thin film 4+ insulating film 5) by evaporation. Finally, the resistor is exfoliated to complete the form of the detector.
COPYRIGHT: (C)1980,JPO&Japio
JP1666779A 1978-05-12 1979-02-14 Production of magnetic detector Granted JPS55108988A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP1666779A JPS55108988A (en) 1979-02-14 1979-02-14 Production of magnetic detector
US06/036,983 US4302822A (en) 1978-05-12 1979-05-08 Thin-film magnetic bubble domain detection device and process for manufacturing the same
US06/266,105 US4390404A (en) 1978-05-12 1981-05-21 Process for manufacture of thin-film magnetic bubble domain detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1666779A JPS55108988A (en) 1979-02-14 1979-02-14 Production of magnetic detector

Publications (2)

Publication Number Publication Date
JPS55108988A true JPS55108988A (en) 1980-08-21
JPS6135626B2 JPS6135626B2 (en) 1986-08-14

Family

ID=11922667

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1666779A Granted JPS55108988A (en) 1978-05-12 1979-02-14 Production of magnetic detector

Country Status (1)

Country Link
JP (1) JPS55108988A (en)

Also Published As

Publication number Publication date
JPS6135626B2 (en) 1986-08-14

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