JPS6131810Y2 - - Google Patents
Info
- Publication number
- JPS6131810Y2 JPS6131810Y2 JP1982194991U JP19499182U JPS6131810Y2 JP S6131810 Y2 JPS6131810 Y2 JP S6131810Y2 JP 1982194991 U JP1982194991 U JP 1982194991U JP 19499182 U JP19499182 U JP 19499182U JP S6131810 Y2 JPS6131810 Y2 JP S6131810Y2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- znse
- sample
- substrate
- polished
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 claims description 36
- 239000000758 substrate Substances 0.000 claims description 20
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 claims description 18
- 229910045601 alloy Inorganic materials 0.000 claims description 10
- 239000000956 alloy Substances 0.000 claims description 10
- 229910000640 Fe alloy Inorganic materials 0.000 claims description 4
- 239000000463 material Substances 0.000 description 7
- 239000007788 liquid Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 1
- 241000501754 Astronotus ocellatus Species 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- -1 stainless steel Chemical compound 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982194991U JPS59124046U (ja) | 1982-02-10 | 1982-02-10 | ＺｎＳｅ研磨用治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982194991U JPS59124046U (ja) | 1982-02-10 | 1982-02-10 | ＺｎＳｅ研磨用治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59124046U JPS59124046U (ja) | 1984-08-21 |
| JPS6131810Y2 true JPS6131810Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-09-16 |
Family
ID=33429757
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1982194991U Granted JPS59124046U (ja) | 1982-02-10 | 1982-02-10 | ＺｎＳｅ研磨用治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59124046U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2787942B2 (ja) * | 1987-12-04 | 1998-08-20 | ティーディーケイ株式会社 | ヘッドピース集合体の研磨方法 |
| JP2001198796A (ja) * | 2000-01-20 | 2001-07-24 | Toray Ind Inc | 研磨方法 |
-
1982
- 1982-02-10 JP JP1982194991U patent/JPS59124046U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59124046U (ja) | 1984-08-21 |