JPS6117627B2 - - Google Patents

Info

Publication number
JPS6117627B2
JPS6117627B2 JP52124503A JP12450377A JPS6117627B2 JP S6117627 B2 JPS6117627 B2 JP S6117627B2 JP 52124503 A JP52124503 A JP 52124503A JP 12450377 A JP12450377 A JP 12450377A JP S6117627 B2 JPS6117627 B2 JP S6117627B2
Authority
JP
Japan
Prior art keywords
wafer
polishing
wafer holding
holding plate
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52124503A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5458294A (en
Inventor
Takashi Shimura
Shinichiro Myoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12450377A priority Critical patent/JPS5458294A/ja
Publication of JPS5458294A publication Critical patent/JPS5458294A/ja
Publication of JPS6117627B2 publication Critical patent/JPS6117627B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP12450377A 1977-10-19 1977-10-19 Waxless polishing device Granted JPS5458294A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12450377A JPS5458294A (en) 1977-10-19 1977-10-19 Waxless polishing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12450377A JPS5458294A (en) 1977-10-19 1977-10-19 Waxless polishing device

Publications (2)

Publication Number Publication Date
JPS5458294A JPS5458294A (en) 1979-05-10
JPS6117627B2 true JPS6117627B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-05-08

Family

ID=14887093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12450377A Granted JPS5458294A (en) 1977-10-19 1977-10-19 Waxless polishing device

Country Status (1)

Country Link
JP (1) JPS5458294A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56146667A (en) * 1980-04-18 1981-11-14 Hitachi Ltd Mirror surface grinder
JPS56157036A (en) * 1980-05-09 1981-12-04 Nec Corp Simultaneous working of both faces of wafer
JP2849533B2 (ja) * 1993-08-18 1999-01-20 長野電子工業株式会社 ウェーハの研磨方法
JP3158934B2 (ja) * 1995-02-28 2001-04-23 三菱マテリアル株式会社 ウェーハ研磨装置

Also Published As

Publication number Publication date
JPS5458294A (en) 1979-05-10

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