JPS6125219B2 - - Google Patents

Info

Publication number
JPS6125219B2
JPS6125219B2 JP54113710A JP11371079A JPS6125219B2 JP S6125219 B2 JPS6125219 B2 JP S6125219B2 JP 54113710 A JP54113710 A JP 54113710A JP 11371079 A JP11371079 A JP 11371079A JP S6125219 B2 JPS6125219 B2 JP S6125219B2
Authority
JP
Japan
Prior art keywords
insulating film
wiring conductor
film
layer
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54113710A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5637632A (en
Inventor
Moritaka Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11371079A priority Critical patent/JPS5637632A/ja
Publication of JPS5637632A publication Critical patent/JPS5637632A/ja
Publication of JPS6125219B2 publication Critical patent/JPS6125219B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP11371079A 1979-09-05 1979-09-05 Semiconductor device Granted JPS5637632A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11371079A JPS5637632A (en) 1979-09-05 1979-09-05 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11371079A JPS5637632A (en) 1979-09-05 1979-09-05 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5637632A JPS5637632A (en) 1981-04-11
JPS6125219B2 true JPS6125219B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-14

Family

ID=14619188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11371079A Granted JPS5637632A (en) 1979-09-05 1979-09-05 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5637632A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6389827U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-12-01 1988-06-10

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5442237A (en) * 1991-10-21 1995-08-15 Motorola Inc. Semiconductor device having a low permittivity dielectric

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6389827U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-12-01 1988-06-10

Also Published As

Publication number Publication date
JPS5637632A (en) 1981-04-11

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