JPH0224382B2 - - Google Patents

Info

Publication number
JPH0224382B2
JPH0224382B2 JP58248164A JP24816483A JPH0224382B2 JP H0224382 B2 JPH0224382 B2 JP H0224382B2 JP 58248164 A JP58248164 A JP 58248164A JP 24816483 A JP24816483 A JP 24816483A JP H0224382 B2 JPH0224382 B2 JP H0224382B2
Authority
JP
Japan
Prior art keywords
film
organic resin
conductor layer
semiconductor device
multilayer wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58248164A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60143649A (ja
Inventor
Mitsuru Hirao
Sumio Kawakami
Shunichi Numata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd, Hitachi Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP24816483A priority Critical patent/JPS60143649A/ja
Publication of JPS60143649A publication Critical patent/JPS60143649A/ja
Publication of JPH0224382B2 publication Critical patent/JPH0224382B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP24816483A 1983-12-29 1983-12-29 半導体装置の多層配線構造 Granted JPS60143649A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24816483A JPS60143649A (ja) 1983-12-29 1983-12-29 半導体装置の多層配線構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24816483A JPS60143649A (ja) 1983-12-29 1983-12-29 半導体装置の多層配線構造

Publications (2)

Publication Number Publication Date
JPS60143649A JPS60143649A (ja) 1985-07-29
JPH0224382B2 true JPH0224382B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-05-29

Family

ID=17174166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24816483A Granted JPS60143649A (ja) 1983-12-29 1983-12-29 半導体装置の多層配線構造

Country Status (1)

Country Link
JP (1) JPS60143649A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0477670A (ja) * 1990-07-20 1992-03-11 Tama Seiki:Kk 抗原抗体反応を用いた定量分析法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0763064B2 (ja) * 1986-03-31 1995-07-05 株式会社日立製作所 Ｉｃ素子における配線接続方法
JPH05326718A (ja) * 1992-05-25 1993-12-10 Mitsubishi Electric Corp 半導体装置およびその製造方法
US6132852A (en) * 1998-03-13 2000-10-17 Hitachi, Ltd. Multilayer wiring substrate and method for production thereof

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5434786A (en) * 1977-08-24 1979-03-14 Hitachi Ltd Electronic apparatus with multi-layer wiring and its manufacture
JPS57154875A (en) * 1981-03-20 1982-09-24 Hitachi Ltd Mos semiconductor device
JPS57162448A (en) * 1981-03-31 1982-10-06 Fujitsu Ltd Formation of multilayer wiring
JPS5846653A (ja) * 1981-09-14 1983-03-18 Fujitsu Ltd 半導体装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0477670A (ja) * 1990-07-20 1992-03-11 Tama Seiki:Kk 抗原抗体反応を用いた定量分析法

Also Published As

Publication number Publication date
JPS60143649A (ja) 1985-07-29

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term