JPS61244043A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS61244043A
JPS61244043A JP60085852A JP8585285A JPS61244043A JP S61244043 A JPS61244043 A JP S61244043A JP 60085852 A JP60085852 A JP 60085852A JP 8585285 A JP8585285 A JP 8585285A JP S61244043 A JPS61244043 A JP S61244043A
Authority
JP
Japan
Prior art keywords
film
polycrystalline
groove
silicon substrate
parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60085852A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0416019B2 (cg-RX-API-DMAC10.html
Inventor
Takashi Hosaka
俊 保坂
Kunihiro Takahashi
邦博 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP60085852A priority Critical patent/JPS61244043A/ja
Publication of JPS61244043A publication Critical patent/JPS61244043A/ja
Publication of JPH0416019B2 publication Critical patent/JPH0416019B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/00—
    • H10W10/01—

Landscapes

  • Element Separation (AREA)
JP60085852A 1985-04-22 1985-04-22 半導体装置の製造方法 Granted JPS61244043A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60085852A JPS61244043A (ja) 1985-04-22 1985-04-22 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60085852A JPS61244043A (ja) 1985-04-22 1985-04-22 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS61244043A true JPS61244043A (ja) 1986-10-30
JPH0416019B2 JPH0416019B2 (cg-RX-API-DMAC10.html) 1992-03-19

Family

ID=13870400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60085852A Granted JPS61244043A (ja) 1985-04-22 1985-04-22 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS61244043A (cg-RX-API-DMAC10.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02226742A (ja) * 1989-02-28 1990-09-10 Mitsubishi Electric Corp 半導体装置の製造方法
JP2006324644A (ja) * 2005-04-18 2006-11-30 Nec Electronics Corp 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02226742A (ja) * 1989-02-28 1990-09-10 Mitsubishi Electric Corp 半導体装置の製造方法
JP2006324644A (ja) * 2005-04-18 2006-11-30 Nec Electronics Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0416019B2 (cg-RX-API-DMAC10.html) 1992-03-19

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