JPS6123654B2 - - Google Patents

Info

Publication number
JPS6123654B2
JPS6123654B2 JP56086578A JP8657881A JPS6123654B2 JP S6123654 B2 JPS6123654 B2 JP S6123654B2 JP 56086578 A JP56086578 A JP 56086578A JP 8657881 A JP8657881 A JP 8657881A JP S6123654 B2 JPS6123654 B2 JP S6123654B2
Authority
JP
Japan
Prior art keywords
semiconductor
voltage
semiconductor device
semiconductor substrate
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56086578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57201041A (en
Inventor
Michio Honma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP56086578A priority Critical patent/JPS57201041A/ja
Publication of JPS57201041A publication Critical patent/JPS57201041A/ja
Publication of JPS6123654B2 publication Critical patent/JPS6123654B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP56086578A 1981-06-05 1981-06-05 Testing method for semiconductor wafer Granted JPS57201041A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56086578A JPS57201041A (en) 1981-06-05 1981-06-05 Testing method for semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56086578A JPS57201041A (en) 1981-06-05 1981-06-05 Testing method for semiconductor wafer

Publications (2)

Publication Number Publication Date
JPS57201041A JPS57201041A (en) 1982-12-09
JPS6123654B2 true JPS6123654B2 (https=) 1986-06-06

Family

ID=13890882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56086578A Granted JPS57201041A (en) 1981-06-05 1981-06-05 Testing method for semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS57201041A (https=)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57152140A (en) * 1981-03-14 1982-09-20 Nec Home Electronics Ltd Measurement of characteristic of semiconductor device

Also Published As

Publication number Publication date
JPS57201041A (en) 1982-12-09

Similar Documents

Publication Publication Date Title
CA1264868A (en) Semiconductor defect monitor for diagnosing processing-induced defects
JPH0342503B2 (https=)
EP0374466A1 (en) In-line process monitors for thin film wiring
JPH0245339B2 (ja) Handotaishusekikairosochi
JPS6123654B2 (https=)
JP2657315B2 (ja) プローブカード
JP3093216B2 (ja) 半導体装置及びその検査方法
JPH08330368A (ja) 半導体回路装置群及びそのプローブ試験方法
JP2001110858A (ja) 半導体装置およびその製造方法、ならびにバーンイン装置
JPS618939A (ja) 半導体装置
JPS6137777B2 (https=)
JPH05206383A (ja) 半導体ウエハー及びその検査方法
JPH0689932A (ja) パワーｍｏｓｆｅｔのバーンイン装置
JPH0566732B2 (https=)
JPS6222448A (ja) Ｉｃの形成されたウエ−ハ
JPS5814608Y2 (ja) ウエハ−検査装置
JP3771016B2 (ja) ウェハ一括型プローブカードによる検査に適した半導体装置およびその検査方法ならびにプローブカード
JPH0262947B2 (https=)
JPH05211219A (ja) 半導体記憶装置のバーンイン方法
JP2826400B2 (ja) 半導体装置の検査方法
US7123042B2 (en) Methods, apparatus and systems for wafer-level burn-in stressing of semiconductor devices
JPS5918864B2 (ja) 半導体ウエハ−検査装置
JPS6218037Y2 (https=)
JPH11126807A (ja) 半導体集積回路の検査方法
JPH01248633A (ja) 半導体集積回路検査装置