JPS57201041A - Testing method for semiconductor wafer - Google Patents

Testing method for semiconductor wafer

Info

Publication number
JPS57201041A
JPS57201041A JP56086578A JP8657881A JPS57201041A JP S57201041 A JPS57201041 A JP S57201041A JP 56086578 A JP56086578 A JP 56086578A JP 8657881 A JP8657881 A JP 8657881A JP S57201041 A JPS57201041 A JP S57201041A
Authority
JP
Japan
Prior art keywords
substrate
voltage
group
semiconductor wafer
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56086578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6123654B2 (https=
Inventor
Michio Honma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56086578A priority Critical patent/JPS57201041A/ja
Publication of JPS57201041A publication Critical patent/JPS57201041A/ja
Publication of JPS6123654B2 publication Critical patent/JPS6123654B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP56086578A 1981-06-05 1981-06-05 Testing method for semiconductor wafer Granted JPS57201041A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56086578A JPS57201041A (en) 1981-06-05 1981-06-05 Testing method for semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56086578A JPS57201041A (en) 1981-06-05 1981-06-05 Testing method for semiconductor wafer

Publications (2)

Publication Number Publication Date
JPS57201041A true JPS57201041A (en) 1982-12-09
JPS6123654B2 JPS6123654B2 (https=) 1986-06-06

Family

ID=13890882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56086578A Granted JPS57201041A (en) 1981-06-05 1981-06-05 Testing method for semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS57201041A (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57152140A (en) * 1981-03-14 1982-09-20 Nec Home Electronics Ltd Measurement of characteristic of semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57152140A (en) * 1981-03-14 1982-09-20 Nec Home Electronics Ltd Measurement of characteristic of semiconductor device

Also Published As

Publication number Publication date
JPS6123654B2 (https=) 1986-06-06

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