JPS5521158A - Checking method for semiconductor device - Google Patents

Checking method for semiconductor device

Info

Publication number
JPS5521158A
JPS5521158A JP9425178A JP9425178A JPS5521158A JP S5521158 A JPS5521158 A JP S5521158A JP 9425178 A JP9425178 A JP 9425178A JP 9425178 A JP9425178 A JP 9425178A JP S5521158 A JPS5521158 A JP S5521158A
Authority
JP
Japan
Prior art keywords
time
temperature
heated
semiconductor
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9425178A
Other languages
Japanese (ja)
Inventor
Michio Honma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9425178A priority Critical patent/JPS5521158A/en
Publication of JPS5521158A publication Critical patent/JPS5521158A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Semiconductor Memories (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

PURPOSE: To shorten a testing time by checking a sustaining time of a memory after raising the temperature of a semiconductor wafer upto a predetermined level beforehand.
CONSTITUTION: A semiconductor memory device 1 is beforehand heated in an infrared ray irradiation portion 6 and the semiconductor device 1 heated is mounted on a heat plate 2 sustained at a predetermined temperature by a temperature control unit 3 through a loader 5. At this time, the semiconductor memory 1 is heated upto the temperature same as that of the heat plate 2 in a short time. Successively, the time measurement utilizing a tester 8 is established by contacting a measuring probe 9 with the semiconductor memory 1. According to such a construction, the checking time of the sustaining test can be shortened, therefore, the utilizing time of the test device for the semiconductor device can also be shortened.
COPYRIGHT: (C)1980,JPO&Japio
JP9425178A 1978-08-01 1978-08-01 Checking method for semiconductor device Pending JPS5521158A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9425178A JPS5521158A (en) 1978-08-01 1978-08-01 Checking method for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9425178A JPS5521158A (en) 1978-08-01 1978-08-01 Checking method for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5521158A true JPS5521158A (en) 1980-02-15

Family

ID=14105071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9425178A Pending JPS5521158A (en) 1978-08-01 1978-08-01 Checking method for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5521158A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5776461A (en) * 1980-10-31 1982-05-13 Ushio Inc Device for maintaining constant temperature of flat body
JPS57153273U (en) * 1981-03-20 1982-09-25
JPS5966160U (en) * 1982-10-25 1984-05-02 日本電気株式会社 semiconductor test equipment
JPS61178772U (en) * 1985-04-27 1986-11-07
JPH01145869A (en) * 1987-12-01 1989-06-07 Nec Ic Microcomput Syst Ltd Manufacture of uveprom with redundant circuit
JPH02110097A (en) * 1989-09-20 1990-04-23 Hitachi Ltd Elevator hall door device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5244180A (en) * 1975-10-03 1977-04-06 Mitsubishi Electric Corp Semiconductor intergrated circuit
JPS52146566A (en) * 1976-05-31 1977-12-06 Fujitsu Ltd Testing of semiconductor devices

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5244180A (en) * 1975-10-03 1977-04-06 Mitsubishi Electric Corp Semiconductor intergrated circuit
JPS52146566A (en) * 1976-05-31 1977-12-06 Fujitsu Ltd Testing of semiconductor devices

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5776461A (en) * 1980-10-31 1982-05-13 Ushio Inc Device for maintaining constant temperature of flat body
JPS6334989B2 (en) * 1980-10-31 1988-07-13 Ushio Electric Inc
JPS57153273U (en) * 1981-03-20 1982-09-25
JPH0412469Y2 (en) * 1981-03-20 1992-03-25
JPS5966160U (en) * 1982-10-25 1984-05-02 日本電気株式会社 semiconductor test equipment
JPS6319814Y2 (en) * 1982-10-25 1988-06-02
JPS61178772U (en) * 1985-04-27 1986-11-07
JPH01145869A (en) * 1987-12-01 1989-06-07 Nec Ic Microcomput Syst Ltd Manufacture of uveprom with redundant circuit
JPH02110097A (en) * 1989-09-20 1990-04-23 Hitachi Ltd Elevator hall door device
JPH0525797B2 (en) * 1989-09-20 1993-04-14 Hitachi Seisakusho Kk

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