JPS5521158A - Checking method for semiconductor device - Google Patents
Checking method for semiconductor deviceInfo
- Publication number
- JPS5521158A JPS5521158A JP9425178A JP9425178A JPS5521158A JP S5521158 A JPS5521158 A JP S5521158A JP 9425178 A JP9425178 A JP 9425178A JP 9425178 A JP9425178 A JP 9425178A JP S5521158 A JPS5521158 A JP S5521158A
- Authority
- JP
- Japan
- Prior art keywords
- time
- temperature
- heated
- semiconductor
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Semiconductor Memories (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
PURPOSE: To shorten a testing time by checking a sustaining time of a memory after raising the temperature of a semiconductor wafer upto a predetermined level beforehand.
CONSTITUTION: A semiconductor memory device 1 is beforehand heated in an infrared ray irradiation portion 6 and the semiconductor device 1 heated is mounted on a heat plate 2 sustained at a predetermined temperature by a temperature control unit 3 through a loader 5. At this time, the semiconductor memory 1 is heated upto the temperature same as that of the heat plate 2 in a short time. Successively, the time measurement utilizing a tester 8 is established by contacting a measuring probe 9 with the semiconductor memory 1. According to such a construction, the checking time of the sustaining test can be shortened, therefore, the utilizing time of the test device for the semiconductor device can also be shortened.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9425178A JPS5521158A (en) | 1978-08-01 | 1978-08-01 | Checking method for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9425178A JPS5521158A (en) | 1978-08-01 | 1978-08-01 | Checking method for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5521158A true JPS5521158A (en) | 1980-02-15 |
Family
ID=14105071
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9425178A Pending JPS5521158A (en) | 1978-08-01 | 1978-08-01 | Checking method for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5521158A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5776461A (en) * | 1980-10-31 | 1982-05-13 | Ushio Inc | Device for maintaining constant temperature of flat body |
JPS57153273U (en) * | 1981-03-20 | 1982-09-25 | ||
JPS5966160U (en) * | 1982-10-25 | 1984-05-02 | 日本電気株式会社 | semiconductor test equipment |
JPS61178772U (en) * | 1985-04-27 | 1986-11-07 | ||
JPH01145869A (en) * | 1987-12-01 | 1989-06-07 | Nec Ic Microcomput Syst Ltd | Manufacture of uveprom with redundant circuit |
JPH02110097A (en) * | 1989-09-20 | 1990-04-23 | Hitachi Ltd | Elevator hall door device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5244180A (en) * | 1975-10-03 | 1977-04-06 | Mitsubishi Electric Corp | Semiconductor intergrated circuit |
JPS52146566A (en) * | 1976-05-31 | 1977-12-06 | Fujitsu Ltd | Testing of semiconductor devices |
-
1978
- 1978-08-01 JP JP9425178A patent/JPS5521158A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5244180A (en) * | 1975-10-03 | 1977-04-06 | Mitsubishi Electric Corp | Semiconductor intergrated circuit |
JPS52146566A (en) * | 1976-05-31 | 1977-12-06 | Fujitsu Ltd | Testing of semiconductor devices |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5776461A (en) * | 1980-10-31 | 1982-05-13 | Ushio Inc | Device for maintaining constant temperature of flat body |
JPS6334989B2 (en) * | 1980-10-31 | 1988-07-13 | Ushio Electric Inc | |
JPS57153273U (en) * | 1981-03-20 | 1982-09-25 | ||
JPH0412469Y2 (en) * | 1981-03-20 | 1992-03-25 | ||
JPS5966160U (en) * | 1982-10-25 | 1984-05-02 | 日本電気株式会社 | semiconductor test equipment |
JPS6319814Y2 (en) * | 1982-10-25 | 1988-06-02 | ||
JPS61178772U (en) * | 1985-04-27 | 1986-11-07 | ||
JPH01145869A (en) * | 1987-12-01 | 1989-06-07 | Nec Ic Microcomput Syst Ltd | Manufacture of uveprom with redundant circuit |
JPH02110097A (en) * | 1989-09-20 | 1990-04-23 | Hitachi Ltd | Elevator hall door device |
JPH0525797B2 (en) * | 1989-09-20 | 1993-04-14 | Hitachi Seisakusho Kk |
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