JPS57115843A - Testing device for wafer - Google Patents

Testing device for wafer

Info

Publication number
JPS57115843A
JPS57115843A JP249881A JP249881A JPS57115843A JP S57115843 A JPS57115843 A JP S57115843A JP 249881 A JP249881 A JP 249881A JP 249881 A JP249881 A JP 249881A JP S57115843 A JPS57115843 A JP S57115843A
Authority
JP
Japan
Prior art keywords
stages
wafers
test equipment
parallelism
housings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP249881A
Other languages
Japanese (ja)
Inventor
Keisuke Okada
Tetsuo Tada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP249881A priority Critical patent/JPS57115843A/en
Publication of JPS57115843A publication Critical patent/JPS57115843A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Abstract

PURPOSE:To eliminate unproductive time a test equipment may experience by a method wherein two pairs of testing stages are provided and some wafers are checked for parallelism and positioning on a pair of stages while others are subjected to some other tests on the other stages. CONSTITUTION:Provided on one side of a test equipment 1 are two measuring stages 6a and transportation lanes 4a and 5a extending from the stages 6a and coupled with housings 2a and 3a for wafers to be measured. Provided symmetrically on the other side of the test equipment 1 are two measuring stages 6b and transportation lanes 4b and 5b extending from the stages 6b and coupled with housings 2b and 3b for measured wafers. This setup allows wafers to be checked for parallelism and positioning on the stages 6b belonging to one of the two lineups while some others are subjected to tests on the stages 6a belonging to the other lineup, enabling the test equipment to waste no time and thus to improve commission rate.
JP249881A 1981-01-10 1981-01-10 Testing device for wafer Pending JPS57115843A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP249881A JPS57115843A (en) 1981-01-10 1981-01-10 Testing device for wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP249881A JPS57115843A (en) 1981-01-10 1981-01-10 Testing device for wafer

Publications (1)

Publication Number Publication Date
JPS57115843A true JPS57115843A (en) 1982-07-19

Family

ID=11531018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP249881A Pending JPS57115843A (en) 1981-01-10 1981-01-10 Testing device for wafer

Country Status (1)

Country Link
JP (1) JPS57115843A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6049642A (en) * 1983-08-29 1985-03-18 Nec Corp Inspecting apparatus for semiconductor device
US5034684A (en) * 1988-10-24 1991-07-23 Tokyo Electron Limited Probe device and method of controlling the same
US11105619B2 (en) 2017-07-14 2021-08-31 Asml Netherlands B.V. Measurement apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5544708A (en) * 1978-09-25 1980-03-29 Hitachi Ltd Alignment device
JPS56130934A (en) * 1980-03-17 1981-10-14 Nec Kyushu Ltd Inspecting device for semiconductor element

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5544708A (en) * 1978-09-25 1980-03-29 Hitachi Ltd Alignment device
JPS56130934A (en) * 1980-03-17 1981-10-14 Nec Kyushu Ltd Inspecting device for semiconductor element

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6049642A (en) * 1983-08-29 1985-03-18 Nec Corp Inspecting apparatus for semiconductor device
US5034684A (en) * 1988-10-24 1991-07-23 Tokyo Electron Limited Probe device and method of controlling the same
US11105619B2 (en) 2017-07-14 2021-08-31 Asml Netherlands B.V. Measurement apparatus
US11874103B2 (en) 2017-07-14 2024-01-16 Asml Netherlands B.V. Measurement apparatus

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