JPS52144977A - Inspecting method of semiconductor devices - Google Patents

Inspecting method of semiconductor devices

Info

Publication number
JPS52144977A
JPS52144977A JP6113176A JP6113176A JPS52144977A JP S52144977 A JPS52144977 A JP S52144977A JP 6113176 A JP6113176 A JP 6113176A JP 6113176 A JP6113176 A JP 6113176A JP S52144977 A JPS52144977 A JP S52144977A
Authority
JP
Japan
Prior art keywords
semiconductor devices
inspecting method
inspection
tests
accepted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6113176A
Other languages
Japanese (ja)
Inventor
Hideo Kano
Koji Itoi
Yuzuru Fujita
Keisuke Makino
Soichiro Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6113176A priority Critical patent/JPS52144977A/en
Publication of JPS52144977A publication Critical patent/JPS52144977A/en
Pending legal-status Critical Current

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  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

PURPOSE: To eliminate the waste in process and lower potential of mixing by providing a method wherein inspection concerning reliability is made by measuring various characteristics of semiconductor devices under high temperature condition, various static characteristic tests are carried out concerning those which have been accepted in this inspection and the semiconductor devices are classified to each class based on the results of said tests.
COPYRIGHT: (C)1977,JPO&Japio
JP6113176A 1976-05-28 1976-05-28 Inspecting method of semiconductor devices Pending JPS52144977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6113176A JPS52144977A (en) 1976-05-28 1976-05-28 Inspecting method of semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6113176A JPS52144977A (en) 1976-05-28 1976-05-28 Inspecting method of semiconductor devices

Publications (1)

Publication Number Publication Date
JPS52144977A true JPS52144977A (en) 1977-12-02

Family

ID=13162206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6113176A Pending JPS52144977A (en) 1976-05-28 1976-05-28 Inspecting method of semiconductor devices

Country Status (1)

Country Link
JP (1) JPS52144977A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60122378A (en) * 1983-12-05 1985-06-29 Toshiba Corp Testing device for temperature cycle of semiconductor device
JPS6166972A (en) * 1984-09-10 1986-04-05 Mitsubishi Electric Corp Inserting device for semiconductor device into substrate for burn-in

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60122378A (en) * 1983-12-05 1985-06-29 Toshiba Corp Testing device for temperature cycle of semiconductor device
JPS6166972A (en) * 1984-09-10 1986-04-05 Mitsubishi Electric Corp Inserting device for semiconductor device into substrate for burn-in

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