JPS5322370A - Inspecting method of semiconductor device - Google Patents
Inspecting method of semiconductor deviceInfo
- Publication number
- JPS5322370A JPS5322370A JP9727076A JP9727076A JPS5322370A JP S5322370 A JPS5322370 A JP S5322370A JP 9727076 A JP9727076 A JP 9727076A JP 9727076 A JP9727076 A JP 9727076A JP S5322370 A JPS5322370 A JP S5322370A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- inspecting method
- pattern
- inspected
- patterns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
Abstract
PURPOSE: To inspect the position deviations of the pattern to be inspected by superposing the pattern to be inspected and their original pattern on an inspecting medium then developing the patterns and measuring the relative deviations of both patterns.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9727076A JPS5322370A (en) | 1976-08-13 | 1976-08-13 | Inspecting method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9727076A JPS5322370A (en) | 1976-08-13 | 1976-08-13 | Inspecting method of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5322370A true JPS5322370A (en) | 1978-03-01 |
Family
ID=14187829
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9727076A Pending JPS5322370A (en) | 1976-08-13 | 1976-08-13 | Inspecting method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5322370A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5679430A (en) * | 1979-12-03 | 1981-06-30 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Manufacture of semiconductor integrated circuit device |
JPS57108970A (en) * | 1980-12-25 | 1982-07-07 | Fujitsu Ltd | Pattern checking method |
EP0443366A1 (en) * | 1990-02-16 | 1991-08-28 | Montres Rado S.A. | Watch case comprising two shells placed edge to edge |
US5771209A (en) * | 1992-03-26 | 1998-06-23 | Createc Patent Holding, S.A. | Wrist watch |
-
1976
- 1976-08-13 JP JP9727076A patent/JPS5322370A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5679430A (en) * | 1979-12-03 | 1981-06-30 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Manufacture of semiconductor integrated circuit device |
JPS57108970A (en) * | 1980-12-25 | 1982-07-07 | Fujitsu Ltd | Pattern checking method |
JPH0214749B2 (en) * | 1980-12-25 | 1990-04-09 | Fujitsu Ltd | |
EP0443366A1 (en) * | 1990-02-16 | 1991-08-28 | Montres Rado S.A. | Watch case comprising two shells placed edge to edge |
US5065375A (en) * | 1990-02-16 | 1991-11-12 | Montres Rado S.A. | Watch case including two abuting shells |
US5771209A (en) * | 1992-03-26 | 1998-06-23 | Createc Patent Holding, S.A. | Wrist watch |
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