JPS544078A - Inspection method of performance of circuit element - Google Patents

Inspection method of performance of circuit element

Info

Publication number
JPS544078A
JPS544078A JP6890977A JP6890977A JPS544078A JP S544078 A JPS544078 A JP S544078A JP 6890977 A JP6890977 A JP 6890977A JP 6890977 A JP6890977 A JP 6890977A JP S544078 A JPS544078 A JP S544078A
Authority
JP
Japan
Prior art keywords
performance
circuit element
inspection method
lot
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6890977A
Other languages
Japanese (ja)
Inventor
Yoichi Asano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6890977A priority Critical patent/JPS544078A/en
Publication of JPS544078A publication Critical patent/JPS544078A/en
Pending legal-status Critical Current

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To perform efficient inspection, by making lot judgement with parameter measurements through desired number of wafers picked up from a lot, and by performing the function performance inspection of each wafer to a good lot and judging defective goods.
COPYRIGHT: (C)1979,JPO&Japio
JP6890977A 1977-06-13 1977-06-13 Inspection method of performance of circuit element Pending JPS544078A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6890977A JPS544078A (en) 1977-06-13 1977-06-13 Inspection method of performance of circuit element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6890977A JPS544078A (en) 1977-06-13 1977-06-13 Inspection method of performance of circuit element

Publications (1)

Publication Number Publication Date
JPS544078A true JPS544078A (en) 1979-01-12

Family

ID=13387240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6890977A Pending JPS544078A (en) 1977-06-13 1977-06-13 Inspection method of performance of circuit element

Country Status (1)

Country Link
JP (1) JPS544078A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60134433A (en) * 1983-12-22 1985-07-17 Sharp Corp Inspection for semiconductor wafer
JPH02103947A (en) * 1987-09-29 1990-04-17 Tokyo Electron Ltd Inspecting method of semiconductor wafer
WO1996026539A1 (en) * 1995-02-24 1996-08-29 Hitachi, Ltd. Method and device for analyzing abnormality of production line and method and device for controlling production line
US7768279B2 (en) 2006-06-27 2010-08-03 Fujitsu Semiconductor Limited Control method and control program for prober

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60134433A (en) * 1983-12-22 1985-07-17 Sharp Corp Inspection for semiconductor wafer
JPH02103947A (en) * 1987-09-29 1990-04-17 Tokyo Electron Ltd Inspecting method of semiconductor wafer
WO1996026539A1 (en) * 1995-02-24 1996-08-29 Hitachi, Ltd. Method and device for analyzing abnormality of production line and method and device for controlling production line
US7768279B2 (en) 2006-06-27 2010-08-03 Fujitsu Semiconductor Limited Control method and control program for prober

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