JPS544078A - Inspection method of performance of circuit element - Google Patents
Inspection method of performance of circuit elementInfo
- Publication number
- JPS544078A JPS544078A JP6890977A JP6890977A JPS544078A JP S544078 A JPS544078 A JP S544078A JP 6890977 A JP6890977 A JP 6890977A JP 6890977 A JP6890977 A JP 6890977A JP S544078 A JPS544078 A JP S544078A
- Authority
- JP
- Japan
- Prior art keywords
- performance
- circuit element
- inspection method
- lot
- inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To perform efficient inspection, by making lot judgement with parameter measurements through desired number of wafers picked up from a lot, and by performing the function performance inspection of each wafer to a good lot and judging defective goods.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6890977A JPS544078A (en) | 1977-06-13 | 1977-06-13 | Inspection method of performance of circuit element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6890977A JPS544078A (en) | 1977-06-13 | 1977-06-13 | Inspection method of performance of circuit element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS544078A true JPS544078A (en) | 1979-01-12 |
Family
ID=13387240
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6890977A Pending JPS544078A (en) | 1977-06-13 | 1977-06-13 | Inspection method of performance of circuit element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS544078A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60134433A (en) * | 1983-12-22 | 1985-07-17 | Sharp Corp | Inspection for semiconductor wafer |
JPH02103947A (en) * | 1987-09-29 | 1990-04-17 | Tokyo Electron Ltd | Inspecting method of semiconductor wafer |
WO1996026539A1 (en) * | 1995-02-24 | 1996-08-29 | Hitachi, Ltd. | Method and device for analyzing abnormality of production line and method and device for controlling production line |
US7768279B2 (en) | 2006-06-27 | 2010-08-03 | Fujitsu Semiconductor Limited | Control method and control program for prober |
-
1977
- 1977-06-13 JP JP6890977A patent/JPS544078A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60134433A (en) * | 1983-12-22 | 1985-07-17 | Sharp Corp | Inspection for semiconductor wafer |
JPH02103947A (en) * | 1987-09-29 | 1990-04-17 | Tokyo Electron Ltd | Inspecting method of semiconductor wafer |
WO1996026539A1 (en) * | 1995-02-24 | 1996-08-29 | Hitachi, Ltd. | Method and device for analyzing abnormality of production line and method and device for controlling production line |
US7768279B2 (en) | 2006-06-27 | 2010-08-03 | Fujitsu Semiconductor Limited | Control method and control program for prober |
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