JPS61127127A - ミラー取付け装置 - Google Patents

ミラー取付け装置

Info

Publication number
JPS61127127A
JPS61127127A JP59248017A JP24801784A JPS61127127A JP S61127127 A JPS61127127 A JP S61127127A JP 59248017 A JP59248017 A JP 59248017A JP 24801784 A JP24801784 A JP 24801784A JP S61127127 A JPS61127127 A JP S61127127A
Authority
JP
Japan
Prior art keywords
mirror
point
line
theta
alpha
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59248017A
Other languages
English (en)
Japanese (ja)
Other versions
JPH049479B2 (https=
Inventor
Kozo Kurimoto
栗本　宏三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59248017A priority Critical patent/JPS61127127A/ja
Publication of JPS61127127A publication Critical patent/JPS61127127A/ja
Publication of JPH049479B2 publication Critical patent/JPH049479B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP59248017A 1984-11-26 1984-11-26 ミラー取付け装置 Granted JPS61127127A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59248017A JPS61127127A (ja) 1984-11-26 1984-11-26 ミラー取付け装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59248017A JPS61127127A (ja) 1984-11-26 1984-11-26 ミラー取付け装置

Publications (2)

Publication Number Publication Date
JPS61127127A true JPS61127127A (ja) 1986-06-14
JPH049479B2 JPH049479B2 (https=) 1992-02-20

Family

ID=17171958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59248017A Granted JPS61127127A (ja) 1984-11-26 1984-11-26 ミラー取付け装置

Country Status (1)

Country Link
JP (1) JPS61127127A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63195589A (ja) * 1987-02-09 1988-08-12 工業技術院長 微小位置決め機構

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63195589A (ja) * 1987-02-09 1988-08-12 工業技術院長 微小位置決め機構

Also Published As

Publication number Publication date
JPH049479B2 (https=) 1992-02-20

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term