JPH049479B2 - - Google Patents

Info

Publication number
JPH049479B2
JPH049479B2 JP59248017A JP24801784A JPH049479B2 JP H049479 B2 JPH049479 B2 JP H049479B2 JP 59248017 A JP59248017 A JP 59248017A JP 24801784 A JP24801784 A JP 24801784A JP H049479 B2 JPH049479 B2 JP H049479B2
Authority
JP
Japan
Prior art keywords
mirror
stage
spacer
fixed base
mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59248017A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61127127A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP59248017A priority Critical patent/JPS61127127A/ja
Publication of JPS61127127A publication Critical patent/JPS61127127A/ja
Publication of JPH049479B2 publication Critical patent/JPH049479B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP59248017A 1984-11-26 1984-11-26 ミラー取付け装置 Granted JPS61127127A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59248017A JPS61127127A (ja) 1984-11-26 1984-11-26 ミラー取付け装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59248017A JPS61127127A (ja) 1984-11-26 1984-11-26 ミラー取付け装置

Publications (2)

Publication Number Publication Date
JPS61127127A JPS61127127A (ja) 1986-06-14
JPH049479B2 true JPH049479B2 (https=) 1992-02-20

Family

ID=17171958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59248017A Granted JPS61127127A (ja) 1984-11-26 1984-11-26 ミラー取付け装置

Country Status (1)

Country Link
JP (1) JPS61127127A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63195589A (ja) * 1987-02-09 1988-08-12 工業技術院長 微小位置決め機構

Also Published As

Publication number Publication date
JPS61127127A (ja) 1986-06-14

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term