JPS6074682A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6074682A
JPS6074682A JP58182715A JP18271583A JPS6074682A JP S6074682 A JPS6074682 A JP S6074682A JP 58182715 A JP58182715 A JP 58182715A JP 18271583 A JP18271583 A JP 18271583A JP S6074682 A JPS6074682 A JP S6074682A
Authority
JP
Japan
Prior art keywords
film
semiconductor
semiconductor device
region
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58182715A
Other languages
English (en)
Japanese (ja)
Other versions
JPH056345B2 (en, 2012
Inventor
Hajime Sasaki
元 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP58182715A priority Critical patent/JPS6074682A/ja
Publication of JPS6074682A publication Critical patent/JPS6074682A/ja
Publication of JPH056345B2 publication Critical patent/JPH056345B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP58182715A 1983-09-30 1983-09-30 半導体装置の製造方法 Granted JPS6074682A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58182715A JPS6074682A (ja) 1983-09-30 1983-09-30 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58182715A JPS6074682A (ja) 1983-09-30 1983-09-30 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6074682A true JPS6074682A (ja) 1985-04-26
JPH056345B2 JPH056345B2 (en, 2012) 1993-01-26

Family

ID=16123166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58182715A Granted JPS6074682A (ja) 1983-09-30 1983-09-30 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6074682A (en, 2012)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61292678A (ja) * 1985-06-21 1986-12-23 株式会社日立製作所 表示制御装置
US5051805A (en) * 1987-07-15 1991-09-24 Rockwell International Corporation Sub-micron bipolar devices with sub-micron contacts
JPH04278385A (ja) * 1991-03-07 1992-10-02 Oji Paper Co Ltd 感熱記録材料

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5379378A (en) * 1976-12-23 1978-07-13 Matsushita Electric Ind Co Ltd Semoconductor davice and its production
JPS58130569A (ja) * 1982-01-28 1983-08-04 Toshiba Corp 半導体装置の製造方法
JPS58158972A (ja) * 1982-03-16 1983-09-21 Toshiba Corp 半導体装置の製造方法
JPS58162064A (ja) * 1982-03-23 1983-09-26 Nippon Telegr & Teleph Corp <Ntt> 半導体装置の製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5379378A (en) * 1976-12-23 1978-07-13 Matsushita Electric Ind Co Ltd Semoconductor davice and its production
JPS58130569A (ja) * 1982-01-28 1983-08-04 Toshiba Corp 半導体装置の製造方法
JPS58158972A (ja) * 1982-03-16 1983-09-21 Toshiba Corp 半導体装置の製造方法
JPS58162064A (ja) * 1982-03-23 1983-09-26 Nippon Telegr & Teleph Corp <Ntt> 半導体装置の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61292678A (ja) * 1985-06-21 1986-12-23 株式会社日立製作所 表示制御装置
US5051805A (en) * 1987-07-15 1991-09-24 Rockwell International Corporation Sub-micron bipolar devices with sub-micron contacts
JPH04278385A (ja) * 1991-03-07 1992-10-02 Oji Paper Co Ltd 感熱記録材料

Also Published As

Publication number Publication date
JPH056345B2 (en, 2012) 1993-01-26

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