JPS6037618B2 - 半導体装置 - Google Patents
半導体装置Info
- Publication number
- JPS6037618B2 JPS6037618B2 JP49049477A JP4947774A JPS6037618B2 JP S6037618 B2 JPS6037618 B2 JP S6037618B2 JP 49049477 A JP49049477 A JP 49049477A JP 4947774 A JP4947774 A JP 4947774A JP S6037618 B2 JPS6037618 B2 JP S6037618B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- film
- semiconductor substrate
- semiconductor
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP49049477A JPS6037618B2 (ja) | 1974-05-02 | 1974-05-02 | 半導体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP49049477A JPS6037618B2 (ja) | 1974-05-02 | 1974-05-02 | 半導体装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57130784A Division JPS58121665A (ja) | 1982-07-26 | 1982-07-26 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS50141982A JPS50141982A (enrdf_load_stackoverflow) | 1975-11-15 |
JPS6037618B2 true JPS6037618B2 (ja) | 1985-08-27 |
Family
ID=12832223
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP49049477A Expired JPS6037618B2 (ja) | 1974-05-02 | 1974-05-02 | 半導体装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6037618B2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53109487A (en) * | 1977-03-07 | 1978-09-25 | Matsushita Electric Ind Co Ltd | Manufacture for semiconductor device |
JPS559490A (en) * | 1978-07-07 | 1980-01-23 | Matsushita Electric Ind Co Ltd | Production method of insulating gate type semiconductor device |
JPS5826178B2 (ja) * | 1979-11-30 | 1983-06-01 | 株式会社東芝 | 半導体装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4915913A (enrdf_load_stackoverflow) * | 1972-06-09 | 1974-02-12 |
-
1974
- 1974-05-02 JP JP49049477A patent/JPS6037618B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS50141982A (enrdf_load_stackoverflow) | 1975-11-15 |
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