JPS6028194A - セラミックヒータの製造方法 - Google Patents
セラミックヒータの製造方法Info
- Publication number
- JPS6028194A JPS6028194A JP58136382A JP13638283A JPS6028194A JP S6028194 A JPS6028194 A JP S6028194A JP 58136382 A JP58136382 A JP 58136382A JP 13638283 A JP13638283 A JP 13638283A JP S6028194 A JPS6028194 A JP S6028194A
- Authority
- JP
- Japan
- Prior art keywords
- resistance
- heating element
- mosi2
- resistance value
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims description 6
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 claims description 19
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 9
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 8
- 229910021343 molybdenum disilicide Inorganic materials 0.000 claims description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 18
- 238000010438 heat treatment Methods 0.000 description 15
- 230000003647 oxidation Effects 0.000 description 13
- 238000007254 oxidation reaction Methods 0.000 description 13
- 229910021344 molybdenum silicide Inorganic materials 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 9
- 229910052757 nitrogen Inorganic materials 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 238000010304 firing Methods 0.000 description 6
- 230000035939 shock Effects 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 5
- 229910010271 silicon carbide Inorganic materials 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000001590 oxidative effect Effects 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007858 starting material Substances 0.000 description 3
- 229910015503 Mo5Si3 Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910016006 MoSi Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000000788 chromium alloy Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229910052878 cordierite Inorganic materials 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- -1 iron-chromium-aluminum Chemical compound 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 1
- 238000013001 point bending Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Resistance Heating (AREA)
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58136382A JPS6028194A (ja) | 1983-07-25 | 1983-07-25 | セラミックヒータの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58136382A JPS6028194A (ja) | 1983-07-25 | 1983-07-25 | セラミックヒータの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6028194A true JPS6028194A (ja) | 1985-02-13 |
| JPH044715B2 JPH044715B2 (enrdf_load_stackoverflow) | 1992-01-29 |
Family
ID=15173843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58136382A Granted JPS6028194A (ja) | 1983-07-25 | 1983-07-25 | セラミックヒータの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6028194A (enrdf_load_stackoverflow) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6182596A (ja) * | 1985-02-04 | 1986-04-26 | Showa Electric Wire & Cable Co Ltd | 内插多重信号の分離回路 |
| JPS6282685A (ja) * | 1985-10-04 | 1987-04-16 | 株式会社デンソー | ヒ−タ用セラミツク発熱体およびその製造方法 |
| JPH01317170A (ja) * | 1988-03-29 | 1989-12-21 | Nippon Denso Co Ltd | 導電性セラミックヒータおよびこの導電性セラミックヒータの製造方法さらにはこの導電性セラミックヒータを有する自己制御型グロープラグ |
| EP0874534A3 (en) * | 1997-04-23 | 1999-06-16 | NGK Spark Plug Co. Ltd. | A ceramic heater, a method of making the same and a ceramic glow plug having the ceramic heater |
| EP0933342A3 (en) * | 1998-01-30 | 1999-11-03 | Ngk Spark Plug Co., Ltd | Ceramic heater and method of manufacturing the same |
| JP2000515481A (ja) * | 1997-05-28 | 2000-11-21 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | セラミック複合構造体からなる成形体の製造法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59146184A (ja) * | 1983-02-08 | 1984-08-21 | 株式会社デンソー | セラミツクヒ−タ |
-
1983
- 1983-07-25 JP JP58136382A patent/JPS6028194A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59146184A (ja) * | 1983-02-08 | 1984-08-21 | 株式会社デンソー | セラミツクヒ−タ |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6182596A (ja) * | 1985-02-04 | 1986-04-26 | Showa Electric Wire & Cable Co Ltd | 内插多重信号の分離回路 |
| JPS6282685A (ja) * | 1985-10-04 | 1987-04-16 | 株式会社デンソー | ヒ−タ用セラミツク発熱体およびその製造方法 |
| JPH01317170A (ja) * | 1988-03-29 | 1989-12-21 | Nippon Denso Co Ltd | 導電性セラミックヒータおよびこの導電性セラミックヒータの製造方法さらにはこの導電性セラミックヒータを有する自己制御型グロープラグ |
| EP0874534A3 (en) * | 1997-04-23 | 1999-06-16 | NGK Spark Plug Co. Ltd. | A ceramic heater, a method of making the same and a ceramic glow plug having the ceramic heater |
| JP2000515481A (ja) * | 1997-05-28 | 2000-11-21 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | セラミック複合構造体からなる成形体の製造法 |
| EP0933342A3 (en) * | 1998-01-30 | 1999-11-03 | Ngk Spark Plug Co., Ltd | Ceramic heater and method of manufacturing the same |
| US6143238A (en) * | 1998-01-30 | 2000-11-07 | Ngk Spark Plug Co., Ltd. | Method for manufacturing a ceramic heater |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH044715B2 (enrdf_load_stackoverflow) | 1992-01-29 |
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