JPS6025750U - 気相成長装置 - Google Patents

気相成長装置

Info

Publication number
JPS6025750U
JPS6025750U JP11612683U JP11612683U JPS6025750U JP S6025750 U JPS6025750 U JP S6025750U JP 11612683 U JP11612683 U JP 11612683U JP 11612683 U JP11612683 U JP 11612683U JP S6025750 U JPS6025750 U JP S6025750U
Authority
JP
Japan
Prior art keywords
vapor phase
phase growth
growth equipment
turntable
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11612683U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6138913Y2 (enrdf_load_stackoverflow
Inventor
林　善夫
今井　利郎
Original Assignee
ロ−ム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ロ−ム株式会社 filed Critical ロ−ム株式会社
Priority to JP11612683U priority Critical patent/JPS6025750U/ja
Publication of JPS6025750U publication Critical patent/JPS6025750U/ja
Application granted granted Critical
Publication of JPS6138913Y2 publication Critical patent/JPS6138913Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP11612683U 1983-07-25 1983-07-25 気相成長装置 Granted JPS6025750U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11612683U JPS6025750U (ja) 1983-07-25 1983-07-25 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11612683U JPS6025750U (ja) 1983-07-25 1983-07-25 気相成長装置

Publications (2)

Publication Number Publication Date
JPS6025750U true JPS6025750U (ja) 1985-02-21
JPS6138913Y2 JPS6138913Y2 (enrdf_load_stackoverflow) 1986-11-08

Family

ID=30267820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11612683U Granted JPS6025750U (ja) 1983-07-25 1983-07-25 気相成長装置

Country Status (1)

Country Link
JP (1) JPS6025750U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6138913Y2 (enrdf_load_stackoverflow) 1986-11-08

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