JPS60226406A - β型炭化けい素粉末の製造方法 - Google Patents
β型炭化けい素粉末の製造方法Info
- Publication number
- JPS60226406A JPS60226406A JP59081454A JP8145484A JPS60226406A JP S60226406 A JPS60226406 A JP S60226406A JP 59081454 A JP59081454 A JP 59081454A JP 8145484 A JP8145484 A JP 8145484A JP S60226406 A JPS60226406 A JP S60226406A
- Authority
- JP
- Japan
- Prior art keywords
- compound
- powder
- liquid
- producing
- polymerization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 63
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 61
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 51
- 239000007788 liquid Substances 0.000 claims abstract description 50
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 41
- 150000002894 organic compounds Chemical class 0.000 claims abstract description 37
- 238000004132 cross linking Methods 0.000 claims abstract description 31
- 238000006116 polymerization reaction Methods 0.000 claims abstract description 30
- 150000003377 silicon compounds Chemical class 0.000 claims abstract description 26
- 125000000524 functional group Chemical group 0.000 claims abstract description 24
- 238000010438 heat treatment Methods 0.000 claims abstract description 23
- 239000003054 catalyst Substances 0.000 claims abstract description 16
- 239000012298 atmosphere Substances 0.000 claims abstract description 15
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 14
- 239000000463 material Substances 0.000 claims abstract description 12
- 239000002253 acid Substances 0.000 claims abstract description 9
- 239000002243 precursor Substances 0.000 claims abstract description 8
- 229910052910 alkali metal silicate Inorganic materials 0.000 claims abstract description 5
- 238000006243 chemical reaction Methods 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 33
- 238000004519 manufacturing process Methods 0.000 claims description 20
- 239000002994 raw material Substances 0.000 claims description 14
- 150000002148 esters Chemical class 0.000 claims description 8
- 230000001590 oxidative effect Effects 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 6
- 238000000354 decomposition reaction Methods 0.000 claims description 4
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 4
- 150000002902 organometallic compounds Chemical class 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 230000003197 catalytic effect Effects 0.000 claims description 2
- 230000000379 polymerizing effect Effects 0.000 claims 1
- 239000000843 powder Substances 0.000 abstract description 63
- 239000000203 mixture Substances 0.000 abstract description 17
- 229910052760 oxygen Inorganic materials 0.000 abstract description 9
- 239000000243 solution Substances 0.000 abstract description 6
- 150000001875 compounds Chemical class 0.000 abstract description 5
- 239000007864 aqueous solution Substances 0.000 abstract description 3
- 239000011261 inert gas Substances 0.000 abstract description 3
- 229920005989 resin Polymers 0.000 abstract description 3
- 239000011347 resin Substances 0.000 abstract description 3
- 238000010304 firing Methods 0.000 abstract 2
- 239000012071 phase Substances 0.000 description 40
- 239000007787 solid Substances 0.000 description 21
- 235000012239 silicon dioxide Nutrition 0.000 description 20
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 18
- 239000005011 phenolic resin Substances 0.000 description 15
- 239000013078 crystal Substances 0.000 description 13
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 12
- 238000002156 mixing Methods 0.000 description 12
- 238000000634 powder X-ray diffraction Methods 0.000 description 12
- 239000002245 particle Substances 0.000 description 11
- 235000013339 cereals Nutrition 0.000 description 10
- -1 methylol group Chemical group 0.000 description 10
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 8
- 229920000642 polymer Polymers 0.000 description 8
- 238000005245 sintering Methods 0.000 description 8
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 7
- 229920001568 phenolic resin Polymers 0.000 description 7
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 6
- 239000003377 acid catalyst Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 230000005484 gravity Effects 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 235000019353 potassium silicate Nutrition 0.000 description 5
- 229920003987 resole Polymers 0.000 description 5
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 4
- 238000000280 densification Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000001307 helium Substances 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 2
- 229920002307 Dextran Polymers 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- CZMRCDWAGMRECN-UGDNZRGBSA-N Sucrose Chemical compound O[C@H]1[C@H](O)[C@@H](CO)O[C@@]1(CO)O[C@@H]1[C@H](O)[C@@H](O)[C@H](O)[C@@H](CO)O1 CZMRCDWAGMRECN-UGDNZRGBSA-N 0.000 description 2
- 229930006000 Sucrose Natural products 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- 239000002194 amorphous carbon material Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000007833 carbon precursor Substances 0.000 description 2
- 239000003729 cation exchange resin Substances 0.000 description 2
- 239000001913 cellulose Substances 0.000 description 2
- 229920002678 cellulose Polymers 0.000 description 2
- IJKVHSBPTUYDLN-UHFFFAOYSA-N dihydroxy(oxo)silane Chemical compound O[Si](O)=O IJKVHSBPTUYDLN-UHFFFAOYSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 239000007849 furan resin Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000003779 heat-resistant material Substances 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 229910052500 inorganic mineral Inorganic materials 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000011707 mineral Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 150000001451 organic peroxides Chemical class 0.000 description 2
- 235000006408 oxalic acid Nutrition 0.000 description 2
- 239000011295 pitch Substances 0.000 description 2
- 229920002239 polyacrylonitrile Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- 229920002689 polyvinyl acetate Polymers 0.000 description 2
- 239000011118 polyvinyl acetate Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 125000005372 silanol group Chemical group 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- QDRKDTQENPPHOJ-UHFFFAOYSA-N sodium ethoxide Chemical compound [Na+].CC[O-] QDRKDTQENPPHOJ-UHFFFAOYSA-N 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000005720 sucrose Substances 0.000 description 2
- 150000003460 sulfonic acids Chemical class 0.000 description 2
- 238000006227 trimethylsilylation reaction Methods 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229940126062 Compound A Drugs 0.000 description 1
- NLDMNSXOCDLTTB-UHFFFAOYSA-N Heterophylliin A Natural products O1C2COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC2C(OC(=O)C=2C=C(O)C(O)=C(O)C=2)C(O)C1OC(=O)C1=CC(O)=C(O)C(O)=C1 NLDMNSXOCDLTTB-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 241001494479 Pecora Species 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 229920001429 chelating resin Polymers 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- 238000005261 decarburization Methods 0.000 description 1
- HDNHWROHHSBKJG-UHFFFAOYSA-N formaldehyde;furan-2-ylmethanol Chemical compound O=C.OCC1=CC=CO1 HDNHWROHHSBKJG-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-ZSJDYOACSA-N heavy water Substances [2H]O[2H] XLYOFNOQVPJJNP-ZSJDYOACSA-N 0.000 description 1
- 239000008240 homogeneous mixture Substances 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 229910001338 liquidmetal Inorganic materials 0.000 description 1
- 239000012985 polymerization agent Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000011134 resol-type phenolic resin Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 239000011269 tar Substances 0.000 description 1
Landscapes
- Carbon And Carbon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59081454A JPS60226406A (ja) | 1984-04-23 | 1984-04-23 | β型炭化けい素粉末の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59081454A JPS60226406A (ja) | 1984-04-23 | 1984-04-23 | β型炭化けい素粉末の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60226406A true JPS60226406A (ja) | 1985-11-11 |
| JPH0142886B2 JPH0142886B2 (enrdf_load_stackoverflow) | 1989-09-18 |
Family
ID=13746846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59081454A Granted JPS60226406A (ja) | 1984-04-23 | 1984-04-23 | β型炭化けい素粉末の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60226406A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS616111A (ja) * | 1984-06-20 | 1986-01-11 | Bridgestone Corp | 炭素材料の製造方法 |
| DE4223667A1 (de) * | 1991-07-18 | 1993-01-21 | Sumitomo Metal Ind | Verfahren zur herstellung eines (beta)-siliciumcarbidpulvers und halbleiterbauelement-herstellungseinrichtung |
| DE19737127B4 (de) * | 1996-08-26 | 2013-04-04 | Bridgestone Corp. | Herstellungsverfahren für Siliciumcarbidpartikel |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3879813B2 (ja) | 2001-03-14 | 2007-02-14 | 信越化学工業株式会社 | β−炭化珪素微粉末の製造方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52150416A (en) * | 1976-06-08 | 1977-12-14 | Toyo Boseki | Manufacture of silicon carbide containing mold articles |
| JPS5788019A (en) * | 1980-11-13 | 1982-06-01 | Asahi Chem Ind Co Ltd | Manufacture of silicon carbide |
| JPS58185424A (ja) * | 1982-04-21 | 1983-10-29 | Asahi Chem Ind Co Ltd | 炭化ケイ素の製造法 |
-
1984
- 1984-04-23 JP JP59081454A patent/JPS60226406A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52150416A (en) * | 1976-06-08 | 1977-12-14 | Toyo Boseki | Manufacture of silicon carbide containing mold articles |
| JPS5788019A (en) * | 1980-11-13 | 1982-06-01 | Asahi Chem Ind Co Ltd | Manufacture of silicon carbide |
| JPS58185424A (ja) * | 1982-04-21 | 1983-10-29 | Asahi Chem Ind Co Ltd | 炭化ケイ素の製造法 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS616111A (ja) * | 1984-06-20 | 1986-01-11 | Bridgestone Corp | 炭素材料の製造方法 |
| DE4223667A1 (de) * | 1991-07-18 | 1993-01-21 | Sumitomo Metal Ind | Verfahren zur herstellung eines (beta)-siliciumcarbidpulvers und halbleiterbauelement-herstellungseinrichtung |
| FR2679219A1 (fr) * | 1991-07-18 | 1993-01-22 | Sumitomo Metal Ind | Procede de preparation de poudre de carbure de silicium en vue de son utilisation dans des equipements semi-conducteurs. |
| DE4223667B4 (de) * | 1991-07-18 | 2007-01-11 | Bridgestone Corp. | Verfahren zur Herstellung eines β-Siliciumcarbidpulvers und dessen Verwendung für Halbleiterbauelement-Herstellungseinrichtungen |
| DE19737127B4 (de) * | 1996-08-26 | 2013-04-04 | Bridgestone Corp. | Herstellungsverfahren für Siliciumcarbidpartikel |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0142886B2 (enrdf_load_stackoverflow) | 1989-09-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |