JPS5997178A - マトリクス型表示装置 - Google Patents
マトリクス型表示装置Info
- Publication number
- JPS5997178A JPS5997178A JP57208117A JP20811782A JPS5997178A JP S5997178 A JPS5997178 A JP S5997178A JP 57208117 A JP57208117 A JP 57208117A JP 20811782 A JP20811782 A JP 20811782A JP S5997178 A JPS5997178 A JP S5997178A
- Authority
- JP
- Japan
- Prior art keywords
- line
- drain
- matrix type
- display device
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011159 matrix material Substances 0.000 title claims description 24
- 239000004065 semiconductor Substances 0.000 claims description 22
- 239000012535 impurity Substances 0.000 claims description 13
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000004973 liquid crystal related substance Substances 0.000 description 20
- 239000010410 layer Substances 0.000 description 14
- 239000000758 substrate Substances 0.000 description 12
- 239000010408 film Substances 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000009413 insulation Methods 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57208117A JPS5997178A (ja) | 1982-11-25 | 1982-11-25 | マトリクス型表示装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57208117A JPS5997178A (ja) | 1982-11-25 | 1982-11-25 | マトリクス型表示装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5997178A true JPS5997178A (ja) | 1984-06-04 |
| JPH0362243B2 JPH0362243B2 (enrdf_load_stackoverflow) | 1991-09-25 |
Family
ID=16550911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57208117A Granted JPS5997178A (ja) | 1982-11-25 | 1982-11-25 | マトリクス型表示装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5997178A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60140926U (ja) * | 1984-02-24 | 1985-09-18 | 三洋電機株式会社 | 表示装置 |
| JPS61116325U (enrdf_load_stackoverflow) * | 1984-12-30 | 1986-07-23 | ||
| JPS61179486A (ja) * | 1985-02-04 | 1986-08-12 | 三菱電機株式会社 | 半導体装置 |
| JPS6265017A (ja) * | 1985-07-19 | 1987-03-24 | ゼネラル・エレクトリツク・カンパニイ | 冗長な導体構造を持つ薄膜ｆｅｔ駆動形液晶表示装置 |
-
1982
- 1982-11-25 JP JP57208117A patent/JPS5997178A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60140926U (ja) * | 1984-02-24 | 1985-09-18 | 三洋電機株式会社 | 表示装置 |
| JPS61116325U (enrdf_load_stackoverflow) * | 1984-12-30 | 1986-07-23 | ||
| JPS61179486A (ja) * | 1985-02-04 | 1986-08-12 | 三菱電機株式会社 | 半導体装置 |
| JPS6265017A (ja) * | 1985-07-19 | 1987-03-24 | ゼネラル・エレクトリツク・カンパニイ | 冗長な導体構造を持つ薄膜ｆｅｔ駆動形液晶表示装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0362243B2 (enrdf_load_stackoverflow) | 1991-09-25 |
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