JPS5948929A - 半導体装置 - Google Patents
半導体装置Info
- Publication number
- JPS5948929A JPS5948929A JP58145809A JP14580983A JPS5948929A JP S5948929 A JPS5948929 A JP S5948929A JP 58145809 A JP58145809 A JP 58145809A JP 14580983 A JP14580983 A JP 14580983A JP S5948929 A JPS5948929 A JP S5948929A
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- polysiloxane
- microns
- thickness
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
- H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
- H01L21/02214—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen
- H01L21/02216—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen, e.g. a siloxane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US40800582A | 1982-08-13 | 1982-08-13 | |
US408005 | 1982-08-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5948929A true JPS5948929A (ja) | 1984-03-21 |
Family
ID=23614453
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58145809A Pending JPS5948929A (ja) | 1982-08-13 | 1983-08-11 | 半導体装置 |
Country Status (8)
Country | Link |
---|---|
JP (1) | JPS5948929A (fr) |
BE (1) | BE897503A (fr) |
CA (1) | CA1204527A (fr) |
DE (1) | DE3329065A1 (fr) |
FR (1) | FR2531811B1 (fr) |
GB (1) | GB2125423B (fr) |
IT (1) | IT1203708B (fr) |
NL (1) | NL8302845A (fr) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60225447A (ja) * | 1984-04-23 | 1985-11-09 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
JPS62106632A (ja) * | 1985-10-31 | 1987-05-18 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 有機ガラス絶縁層を形成する方法 |
US4732841A (en) * | 1986-03-24 | 1988-03-22 | Fairchild Semiconductor Corporation | Tri-level resist process for fine resolution photolithography |
JPH02291129A (ja) * | 1989-04-28 | 1990-11-30 | Nec Corp | 半導体装置 |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0204631A3 (fr) * | 1985-06-04 | 1987-05-20 | Fairchild Semiconductor Corporation | Structures semi-conductrices comprenant des couches de nivellement en polysiloxane |
US4756977A (en) * | 1986-12-03 | 1988-07-12 | Dow Corning Corporation | Multilayer ceramics from hydrogen silsesquioxane |
US4749631B1 (en) * | 1986-12-04 | 1993-03-23 | Multilayer ceramics from silicate esters | |
US4911992A (en) * | 1986-12-04 | 1990-03-27 | Dow Corning Corporation | Platinum or rhodium catalyzed multilayer ceramic coatings from hydrogen silsesquioxane resin and metal oxides |
US4753855A (en) * | 1986-12-04 | 1988-06-28 | Dow Corning Corporation | Multilayer ceramic coatings from metal oxides for protection of electronic devices |
JPS63213347A (ja) * | 1987-02-27 | 1988-09-06 | Mitsubishi Electric Corp | 半導体装置 |
US4847162A (en) * | 1987-12-28 | 1989-07-11 | Dow Corning Corporation | Multilayer ceramics coatings from the ceramification of hydrogen silsequioxane resin in the presence of ammonia |
IT1226701B (it) * | 1988-07-29 | 1991-02-05 | Eniricerche Spa | Procedimento per la deposizione di organosilani su substrati di silicio o di ossido di silicio per dispositivi del tipo eos o chemfet. |
DE9206834U1 (de) * | 1992-02-21 | 1993-06-17 | Robert Bosch Gmbh, 70469 Stuttgart | Anschlußteil |
JP2934353B2 (ja) * | 1992-06-24 | 1999-08-16 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
JP3262334B2 (ja) | 1992-07-04 | 2002-03-04 | トリコン ホルディングズ リミテッド | 半導体ウエハーを処理する方法 |
EP0736905B1 (fr) * | 1993-08-05 | 2006-01-04 | Matsushita Electric Industrial Co., Ltd. | Dispositif semi-conducteur avec un condensateur et son procédé de fabrication |
US5858880A (en) * | 1994-05-14 | 1999-01-12 | Trikon Equipment Limited | Method of treating a semi-conductor wafer |
WO1998008249A1 (fr) | 1996-08-24 | 1998-02-26 | Trikon Equipments Limited | Procede et appareil de depot d'une couche dielectrique planarisee sur un substrat a semi-conducteur |
TW437017B (en) * | 1998-02-05 | 2001-05-28 | Asm Japan Kk | Silicone polymer insulation film on semiconductor substrate and method for formation thereof |
US6503633B2 (en) * | 2000-05-22 | 2003-01-07 | Jsr Corporation | Composition for film formation, process for producing composition for film formation, method of film formation, and silica-based film |
US7834119B2 (en) | 2002-04-18 | 2010-11-16 | Lg Chem, Ltd. | Organic silicate polymer and insulation film comprising the same |
WO2007064065A2 (fr) | 2005-11-30 | 2007-06-07 | Lg Chem, Ltd. | Mousse microcellulaire de resine thermoplastique preparee avec un colorant possedant une propriete de refroidissement amelioree et son procede d'elaboration |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1347948A (fr) * | 1961-12-15 | 1964-01-04 | Pacific Semiconductors | Procédé d'estérification du bioxyde de silicium à la pression atmosphérique |
JPS5850417B2 (ja) * | 1979-07-31 | 1983-11-10 | 富士通株式会社 | 半導体装置の製造方法 |
JPS5760330A (en) * | 1980-09-27 | 1982-04-12 | Fujitsu Ltd | Resin composition |
-
1983
- 1983-07-14 CA CA000432475A patent/CA1204527A/fr not_active Expired
- 1983-08-01 FR FR8312637A patent/FR2531811B1/fr not_active Expired
- 1983-08-10 BE BE0/211328A patent/BE897503A/fr not_active IP Right Cessation
- 1983-08-10 GB GB08321502A patent/GB2125423B/en not_active Expired
- 1983-08-11 DE DE19833329065 patent/DE3329065A1/de not_active Withdrawn
- 1983-08-11 JP JP58145809A patent/JPS5948929A/ja active Pending
- 1983-08-12 NL NL8302845A patent/NL8302845A/nl not_active Application Discontinuation
- 1983-08-12 IT IT22560/83A patent/IT1203708B/it active
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60225447A (ja) * | 1984-04-23 | 1985-11-09 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
JPH0564464B2 (fr) * | 1984-04-23 | 1993-09-14 | Mitsubishi Electric Corp | |
JPS62106632A (ja) * | 1985-10-31 | 1987-05-18 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 有機ガラス絶縁層を形成する方法 |
US4732841A (en) * | 1986-03-24 | 1988-03-22 | Fairchild Semiconductor Corporation | Tri-level resist process for fine resolution photolithography |
JPH02291129A (ja) * | 1989-04-28 | 1990-11-30 | Nec Corp | 半導体装置 |
Also Published As
Publication number | Publication date |
---|---|
IT8322560A0 (it) | 1983-08-12 |
FR2531811A1 (fr) | 1984-02-17 |
DE3329065A1 (de) | 1984-02-16 |
GB2125423A (en) | 1984-03-07 |
GB2125423B (en) | 1985-09-04 |
GB8321502D0 (en) | 1983-09-14 |
FR2531811B1 (fr) | 1986-10-31 |
BE897503A (fr) | 1983-12-01 |
NL8302845A (nl) | 1984-03-01 |
IT1203708B (it) | 1989-02-15 |
CA1204527A (fr) | 1986-05-13 |
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