JPS5933880A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5933880A
JPS5933880A JP57144491A JP14449182A JPS5933880A JP S5933880 A JPS5933880 A JP S5933880A JP 57144491 A JP57144491 A JP 57144491A JP 14449182 A JP14449182 A JP 14449182A JP S5933880 A JPS5933880 A JP S5933880A
Authority
JP
Japan
Prior art keywords
gate electrode
mask
source
drain
polycrystalline silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57144491A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0322695B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Masanori Sakata
正徳 坂田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP57144491A priority Critical patent/JPS5933880A/ja
Priority to US06/523,656 priority patent/US4558338A/en
Priority to DE8383108133T priority patent/DE3381811D1/de
Priority to EP83108133A priority patent/EP0101608B1/en
Publication of JPS5933880A publication Critical patent/JPS5933880A/ja
Publication of JPH0322695B2 publication Critical patent/JPH0322695B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0223—Manufacture or treatment of FETs having insulated gates [IGFET] having source and drain regions or source and drain extensions self-aligned to sides of the gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/28008—Making conductor-insulator-semiconductor electrodes
    • H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
    • H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
    • H01L21/28114—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor characterised by the sectional shape, e.g. T, inverted-T
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs
    • H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/517—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the conducting layers
    • H10D64/518—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the conducting layers characterised by their lengths or sectional shapes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/661—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor comprising a layer of silicon contacting the insulator, e.g. polysilicon having vertical doping variation
    • H10D64/662—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor comprising a layer of silicon contacting the insulator, e.g. polysilicon having vertical doping variation the conductor further comprising additional layers, e.g. multiple silicon layers having different crystal structures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/082—Ion implantation FETs/COMs

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
JP57144491A 1982-08-19 1982-08-19 半導体装置の製造方法 Granted JPS5933880A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP57144491A JPS5933880A (ja) 1982-08-19 1982-08-19 半導体装置の製造方法
US06/523,656 US4558338A (en) 1982-08-19 1983-08-15 Insulated gate type field effect transistor having a silicon gate electrode
DE8383108133T DE3381811D1 (de) 1982-08-19 1983-08-17 Feldeffekttransistor mit isoliertem gate mit einem gate aus silizium.
EP83108133A EP0101608B1 (en) 1982-08-19 1983-08-17 Insulated gate type field effect transistor having a silicon gate electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57144491A JPS5933880A (ja) 1982-08-19 1982-08-19 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5933880A true JPS5933880A (ja) 1984-02-23
JPH0322695B2 JPH0322695B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-03-27

Family

ID=15363564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57144491A Granted JPS5933880A (ja) 1982-08-19 1982-08-19 半導体装置の製造方法

Country Status (4)

Country Link
US (1) US4558338A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0101608B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS5933880A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3381811D1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6278880A (ja) * 1985-10-01 1987-04-11 Mitsubishi Electric Corp 半導体装置
JPS6338343U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-08-27 1988-03-11
JP2008227292A (ja) * 2007-03-14 2008-09-25 Sumitomo Electric Ind Ltd イオン注入マスク、イオン注入方法および半導体装置の製造方法

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3342773A1 (de) * 1983-11-25 1985-06-05 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von spannungsfesten mos-feldeffekttransistoren mit weichen konzentrationsprofilen am drain-uebergang
US4778236A (en) * 1984-09-14 1988-10-18 Canon Kabushiki Kaisha Thin film optical element
US4886587A (en) * 1984-09-14 1989-12-12 Canon Kabushiki Kaisha Method of producing thin film optical element by ion injection under electric field
US4794565A (en) * 1986-09-15 1988-12-27 The Regents Of The University Of California Electrically programmable memory device employing source side injection
KR970003903B1 (en) * 1987-04-24 1997-03-22 Hitachi Mfg Kk Semiconductor device and fabricating method thereof
US4748133A (en) * 1987-06-26 1988-05-31 Motorola Inc. Deposition of amorphous silicon for the formation of interlevel dielectrics in semiconductor memory devices
JP2624736B2 (ja) * 1988-01-14 1997-06-25 株式会社東芝 半導体装置の製造方法
JP2695014B2 (ja) * 1989-09-06 1997-12-24 株式会社東芝 Ｍｏｓ型半導体装置
US5189504A (en) * 1989-12-11 1993-02-23 Nippon Telegraph And Telephone Corporation Semiconductor device of MOS structure having p-type gate electrode
US5306655A (en) * 1990-07-24 1994-04-26 Matsushita Electric Industrial Co., Ltd. Structure and method of manufacture for MOS field effect transistor having lightly doped drain and source diffusion regions
JP3045946B2 (ja) * 1994-05-09 2000-05-29 インターナショナル・ビジネス・マシーンズ・コーポレイション 半導体デバイスの製造方法
KR960042942A (ko) * 1995-05-04 1996-12-21 빈센트 비.인그라시아 반도체 디바이스 형성 방법
US5981364A (en) * 1995-12-06 1999-11-09 Advanced Micro Devices, Inc. Method of forming a silicon gate to produce silicon devices with improved performance
JPH10125906A (ja) * 1996-10-18 1998-05-15 Rohm Co Ltd 半導体装置及びその製造方法
US6197645B1 (en) * 1997-04-21 2001-03-06 Advanced Micro Devices, Inc. Method of making an IGFET with elevated source/drain regions in close proximity to gate with sloped sidewalls
US5937299A (en) * 1997-04-21 1999-08-10 Advanced Micro Devices, Inc. Method for forming an IGFET with silicide source/drain contacts in close proximity to a gate with sloped sidewalls
US6191044B1 (en) * 1998-10-08 2001-02-20 Advanced Micro Devices, Inc. Method for forming graded LDD transistor using controlled polysilicon gate profile
US6433371B1 (en) * 2000-01-29 2002-08-13 Advanced Micro Devices, Inc. Controlled gate length and gate profile semiconductor device
JP2010245366A (ja) * 2009-04-08 2010-10-28 Fujifilm Corp 電子素子及びその製造方法、並びに表示装置
KR101163224B1 (ko) * 2011-02-15 2012-07-06 에스케이하이닉스 주식회사 듀얼 폴리게이트 형성방법 및 이를 이용한 반도체소자의 제조방법
US8541296B2 (en) * 2011-09-01 2013-09-24 The Institute of Microelectronics Chinese Academy of Science Method of manufacturing dummy gates in gate last process

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4142926A (en) * 1977-02-24 1979-03-06 Intel Corporation Self-aligning double polycrystalline silicon etching process
US4182023A (en) * 1977-10-21 1980-01-08 Ncr Corporation Process for minimum overlap silicon gate devices
US4198250A (en) * 1979-02-05 1980-04-15 Intel Corporation Shadow masking process for forming source and drain regions for field-effect transistors and like regions
US4380773A (en) * 1980-06-30 1983-04-19 Rca Corporation Self aligned aluminum polycrystalline silicon contact
US4371890A (en) * 1980-10-29 1983-02-01 Eastman Kodak Company Tapering of oxidized polysilicon electrodes
US4330931A (en) * 1981-02-03 1982-05-25 Intel Corporation Process for forming metal plated regions and lines in MOS circuits

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6278880A (ja) * 1985-10-01 1987-04-11 Mitsubishi Electric Corp 半導体装置
JPS6338343U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-08-27 1988-03-11
JP2008227292A (ja) * 2007-03-14 2008-09-25 Sumitomo Electric Ind Ltd イオン注入マスク、イオン注入方法および半導体装置の製造方法

Also Published As

Publication number Publication date
EP0101608B1 (en) 1990-08-16
US4558338A (en) 1985-12-10
JPH0322695B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-03-27
EP0101608A3 (en) 1986-06-11
EP0101608A2 (en) 1984-02-29
DE3381811D1 (de) 1990-09-20

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