JPS59191372A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法Info
- Publication number
- JPS59191372A JPS59191372A JP58065822A JP6582283A JPS59191372A JP S59191372 A JPS59191372 A JP S59191372A JP 58065822 A JP58065822 A JP 58065822A JP 6582283 A JP6582283 A JP 6582283A JP S59191372 A JPS59191372 A JP S59191372A
- Authority
- JP
- Japan
- Prior art keywords
- emitter
- base
- transistor
- region
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 17
- 239000012535 impurity Substances 0.000 abstract description 12
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 9
- 229920005591 polysilicon Polymers 0.000 abstract description 9
- 238000009792 diffusion process Methods 0.000 abstract description 8
- 239000000758 substrate Substances 0.000 abstract description 6
- 230000003647 oxidation Effects 0.000 abstract description 3
- 238000007254 oxidation reaction Methods 0.000 abstract description 3
- 230000015556 catabolic process Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 235000014121 butter Nutrition 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
Landscapes
- Bipolar Transistors (AREA)
- Bipolar Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58065822A JPS59191372A (ja) | 1983-04-14 | 1983-04-14 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58065822A JPS59191372A (ja) | 1983-04-14 | 1983-04-14 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59191372A true JPS59191372A (ja) | 1984-10-30 |
| JPH0425705B2 JPH0425705B2 (enrdf_load_stackoverflow) | 1992-05-01 |
Family
ID=13298100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58065822A Granted JPS59191372A (ja) | 1983-04-14 | 1983-04-14 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59191372A (enrdf_load_stackoverflow) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55121675A (en) * | 1979-03-12 | 1980-09-18 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS5661138A (en) * | 1979-10-23 | 1981-05-26 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS57194566A (en) * | 1981-05-27 | 1982-11-30 | Hitachi Ltd | Semiconductor device and manufacture thereof |
-
1983
- 1983-04-14 JP JP58065822A patent/JPS59191372A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55121675A (en) * | 1979-03-12 | 1980-09-18 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS5661138A (en) * | 1979-10-23 | 1981-05-26 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS57194566A (en) * | 1981-05-27 | 1982-11-30 | Hitachi Ltd | Semiconductor device and manufacture thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0425705B2 (enrdf_load_stackoverflow) | 1992-05-01 |
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