JPS59150584A - 半導体ウエハの超音波洗浄方法 - Google Patents

半導体ウエハの超音波洗浄方法

Info

Publication number
JPS59150584A
JPS59150584A JP2276783A JP2276783A JPS59150584A JP S59150584 A JPS59150584 A JP S59150584A JP 2276783 A JP2276783 A JP 2276783A JP 2276783 A JP2276783 A JP 2276783A JP S59150584 A JPS59150584 A JP S59150584A
Authority
JP
Japan
Prior art keywords
cleaning
ultrasonic
cleaning liquid
cleaned
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2276783A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0581314B2 (enrdf_load_stackoverflow
Inventor
春男 天田
精一 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2276783A priority Critical patent/JPS59150584A/ja
Publication of JPS59150584A publication Critical patent/JPS59150584A/ja
Publication of JPH0581314B2 publication Critical patent/JPH0581314B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP2276783A 1983-02-16 1983-02-16 半導体ウエハの超音波洗浄方法 Granted JPS59150584A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2276783A JPS59150584A (ja) 1983-02-16 1983-02-16 半導体ウエハの超音波洗浄方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2276783A JPS59150584A (ja) 1983-02-16 1983-02-16 半導体ウエハの超音波洗浄方法

Publications (2)

Publication Number Publication Date
JPS59150584A true JPS59150584A (ja) 1984-08-28
JPH0581314B2 JPH0581314B2 (enrdf_load_stackoverflow) 1993-11-12

Family

ID=12091820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2276783A Granted JPS59150584A (ja) 1983-02-16 1983-02-16 半導体ウエハの超音波洗浄方法

Country Status (1)

Country Link
JP (1) JPS59150584A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01259536A (ja) * 1988-04-11 1989-10-17 Hitachi Ltd 超音波洗浄スプレイノズルを用いた基板両面の洗浄方法及び洗浄装置
JPH06106144A (ja) * 1992-09-30 1994-04-19 Kokusai Denki Erutetsuku:Kk 超音波洗浄方式及び超音波洗浄装置
JP2006334482A (ja) * 2005-06-01 2006-12-14 Aisawa Construction Co Ltd 洗浄設備
JP2009268948A (ja) * 2008-05-01 2009-11-19 Dainippon Printing Co Ltd フィルム洗浄方法及びフィルム洗浄装置
JP2010244627A (ja) * 2009-04-07 2010-10-28 Alphana Technology Co Ltd ディスク駆動装置の生産方法及びディスク駆動装置
JP2011123984A (ja) * 2009-09-17 2011-06-23 Alphana Technology Co Ltd ディスク駆動装置の生産方法及びその生産方法により生産されたディスク駆動装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4711772U (enrdf_load_stackoverflow) * 1971-03-04 1972-10-12
JPS5153766A (ja) * 1974-11-07 1976-05-12 Kaijo Denki Kk Nozurugatachoonpasenjosochi

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4711772U (enrdf_load_stackoverflow) * 1971-03-04 1972-10-12
JPS5153766A (ja) * 1974-11-07 1976-05-12 Kaijo Denki Kk Nozurugatachoonpasenjosochi

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01259536A (ja) * 1988-04-11 1989-10-17 Hitachi Ltd 超音波洗浄スプレイノズルを用いた基板両面の洗浄方法及び洗浄装置
JPH06106144A (ja) * 1992-09-30 1994-04-19 Kokusai Denki Erutetsuku:Kk 超音波洗浄方式及び超音波洗浄装置
JP2006334482A (ja) * 2005-06-01 2006-12-14 Aisawa Construction Co Ltd 洗浄設備
JP2009268948A (ja) * 2008-05-01 2009-11-19 Dainippon Printing Co Ltd フィルム洗浄方法及びフィルム洗浄装置
JP2010244627A (ja) * 2009-04-07 2010-10-28 Alphana Technology Co Ltd ディスク駆動装置の生産方法及びディスク駆動装置
US8516685B2 (en) 2009-04-07 2013-08-27 Samsung Electro-Mechanics Japan Advanced Technology Co., Ltd. Method of manufacturing a disk drive device for reducing adhesive amount of particles
JP2011123984A (ja) * 2009-09-17 2011-06-23 Alphana Technology Co Ltd ディスク駆動装置の生産方法及びその生産方法により生産されたディスク駆動装置

Also Published As

Publication number Publication date
JPH0581314B2 (enrdf_load_stackoverflow) 1993-11-12

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