JPH0581314B2 - - Google Patents

Info

Publication number
JPH0581314B2
JPH0581314B2 JP58022767A JP2276783A JPH0581314B2 JP H0581314 B2 JPH0581314 B2 JP H0581314B2 JP 58022767 A JP58022767 A JP 58022767A JP 2276783 A JP2276783 A JP 2276783A JP H0581314 B2 JPH0581314 B2 JP H0581314B2
Authority
JP
Japan
Prior art keywords
cleaning
wafer
station
ultrasonic
cleaned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58022767A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59150584A (ja
Inventor
Haruo Amada
Seiichi Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2276783A priority Critical patent/JPS59150584A/ja
Publication of JPS59150584A publication Critical patent/JPS59150584A/ja
Publication of JPH0581314B2 publication Critical patent/JPH0581314B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP2276783A 1983-02-16 1983-02-16 半導体ウエハの超音波洗浄方法 Granted JPS59150584A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2276783A JPS59150584A (ja) 1983-02-16 1983-02-16 半導体ウエハの超音波洗浄方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2276783A JPS59150584A (ja) 1983-02-16 1983-02-16 半導体ウエハの超音波洗浄方法

Publications (2)

Publication Number Publication Date
JPS59150584A JPS59150584A (ja) 1984-08-28
JPH0581314B2 true JPH0581314B2 (enrdf_load_stackoverflow) 1993-11-12

Family

ID=12091820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2276783A Granted JPS59150584A (ja) 1983-02-16 1983-02-16 半導体ウエハの超音波洗浄方法

Country Status (1)

Country Link
JP (1) JPS59150584A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0795540B2 (ja) * 1988-04-11 1995-10-11 株式会社日立製作所 超音波洗浄スプレイノズルを用いた基板両面の洗浄方法及び洗浄装置
JPH06106144A (ja) * 1992-09-30 1994-04-19 Kokusai Denki Erutetsuku:Kk 超音波洗浄方式及び超音波洗浄装置
JP4562589B2 (ja) * 2005-06-01 2010-10-13 アイサワ工業株式会社 洗浄設備
JP5169448B2 (ja) * 2008-05-01 2013-03-27 大日本印刷株式会社 フィルム洗浄方法及びフィルム洗浄装置
JP5520511B2 (ja) 2009-04-07 2014-06-11 サムスン電機ジャパンアドバンスドテクノロジー株式会社 ディスク駆動装置の生産方法及びディスク駆動装置
US8312617B2 (en) * 2009-09-17 2012-11-20 Alphana Technology Co., Ltd. Method of manufacturing a disk drive having a base member, bearing unit, drive unit and hub

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4711772U (enrdf_load_stackoverflow) * 1971-03-04 1972-10-12
JPS5153766A (ja) * 1974-11-07 1976-05-12 Kaijo Denki Kk Nozurugatachoonpasenjosochi

Also Published As

Publication number Publication date
JPS59150584A (ja) 1984-08-28

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