JPS5153766A - Nozurugatachoonpasenjosochi - Google Patents

Nozurugatachoonpasenjosochi

Info

Publication number
JPS5153766A
JPS5153766A JP12749574A JP12749574A JPS5153766A JP S5153766 A JPS5153766 A JP S5153766A JP 12749574 A JP12749574 A JP 12749574A JP 12749574 A JP12749574 A JP 12749574A JP S5153766 A JPS5153766 A JP S5153766A
Authority
JP
Japan
Prior art keywords
nozurugatachoonpasenjosochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12749574A
Other languages
English (en)
Inventor
Hiroyuki Marui
Banri Taoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kaijo Denki Co Ltd
Original Assignee
Kaijo Denki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kaijo Denki Co Ltd filed Critical Kaijo Denki Co Ltd
Priority to JP12749574A priority Critical patent/JPS5153766A/ja
Publication of JPS5153766A publication Critical patent/JPS5153766A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Special Spraying Apparatus (AREA)
JP12749574A 1974-11-07 1974-11-07 Nozurugatachoonpasenjosochi Pending JPS5153766A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12749574A JPS5153766A (ja) 1974-11-07 1974-11-07 Nozurugatachoonpasenjosochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12749574A JPS5153766A (ja) 1974-11-07 1974-11-07 Nozurugatachoonpasenjosochi

Publications (1)

Publication Number Publication Date
JPS5153766A true JPS5153766A (ja) 1976-05-12

Family

ID=14961367

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12749574A Pending JPS5153766A (ja) 1974-11-07 1974-11-07 Nozurugatachoonpasenjosochi

Country Status (1)

Country Link
JP (1) JPS5153766A (ja)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59150584A (ja) * 1983-02-16 1984-08-28 株式会社日立製作所 半導体ウエハの超音波洗浄方法
JPS63126587A (ja) * 1986-11-17 1988-05-30 武蔵工業株式会社 超音波プレ−ト洗浄方法
JPH02966A (ja) * 1988-06-06 1990-01-05 Nec Corp レチクル洗浄装置
JP2000061192A (ja) * 1998-08-20 2000-02-29 Sharp Corp 洗濯機
JP2002224005A (ja) * 2001-02-06 2002-08-13 Suzuki Motor Corp 超音波式清掃方法およびその装置
WO2004075706A1 (ja) * 2003-02-25 2004-09-10 Matsushita Electric Works, Ltd. 超音波洗浄装置
CN100443036C (zh) * 2003-02-25 2008-12-17 松下电工株式会社 超声波洗涤装置
JP2020040019A (ja) * 2018-09-11 2020-03-19 株式会社ディスコ 超音波水噴射装置

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59150584A (ja) * 1983-02-16 1984-08-28 株式会社日立製作所 半導体ウエハの超音波洗浄方法
JPH0581314B2 (ja) * 1983-02-16 1993-11-12 Hitachi Ltd
JPS63126587A (ja) * 1986-11-17 1988-05-30 武蔵工業株式会社 超音波プレ−ト洗浄方法
JPH02966A (ja) * 1988-06-06 1990-01-05 Nec Corp レチクル洗浄装置
JP2000061192A (ja) * 1998-08-20 2000-02-29 Sharp Corp 洗濯機
JP2002224005A (ja) * 2001-02-06 2002-08-13 Suzuki Motor Corp 超音波式清掃方法およびその装置
WO2004075706A1 (ja) * 2003-02-25 2004-09-10 Matsushita Electric Works, Ltd. 超音波洗浄装置
CN100443036C (zh) * 2003-02-25 2008-12-17 松下电工株式会社 超声波洗涤装置
US7549429B2 (en) 2003-02-25 2009-06-23 Panasonic Electric Works Co., Ltd. Ultrasonic washing device
JP2020040019A (ja) * 2018-09-11 2020-03-19 株式会社ディスコ 超音波水噴射装置

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