JPS5913611A - Ｓｉ↓３Ｎ↓４の超微粉の製造方法ならびに製造装置 - Google Patents
Ｓｉ↓３Ｎ↓４の超微粉の製造方法ならびに製造装置Info
- Publication number
- JPS5913611A JPS5913611A JP11942082A JP11942082A JPS5913611A JP S5913611 A JPS5913611 A JP S5913611A JP 11942082 A JP11942082 A JP 11942082A JP 11942082 A JP11942082 A JP 11942082A JP S5913611 A JPS5913611 A JP S5913611A
- Authority
- JP
- Japan
- Prior art keywords
- powder
- sio
- ultrafine
- nozzle
- amorphous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000843 powder Substances 0.000 title claims abstract description 112
- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000004519 manufacturing process Methods 0.000 title description 13
- 239000002245 particle Substances 0.000 claims abstract description 35
- 238000010438 heat treatment Methods 0.000 claims abstract description 34
- 239000012298 atmosphere Substances 0.000 claims abstract description 28
- 238000005121 nitriding Methods 0.000 claims abstract description 26
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 7
- 229910005091 Si3N Inorganic materials 0.000 claims description 7
- 230000008569 process Effects 0.000 claims description 7
- 238000010000 carbonizing Methods 0.000 claims description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 abstract description 43
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 abstract description 16
- 239000000203 mixture Substances 0.000 abstract description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 12
- 238000001816 cooling Methods 0.000 abstract description 8
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 6
- 150000004767 nitrides Chemical class 0.000 abstract description 5
- 229910021529 ammonia Inorganic materials 0.000 abstract description 4
- 229910052799 carbon Inorganic materials 0.000 abstract description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 3
- 238000011049 filling Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 19
- 239000002994 raw material Substances 0.000 description 10
- 239000007858 starting material Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000009826 distribution Methods 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 6
- 238000007796 conventional method Methods 0.000 description 6
- 230000002829 reductive effect Effects 0.000 description 6
- 239000011362 coarse particle Substances 0.000 description 5
- 238000009833 condensation Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 230000005494 condensation Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- 238000000635 electron micrograph Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000010298 pulverizing process Methods 0.000 description 3
- 238000010791 quenching Methods 0.000 description 3
- 230000035484 reaction time Effects 0.000 description 3
- 239000011863 silicon-based powder Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000011882 ultra-fine particle Substances 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 235000013339 cereals Nutrition 0.000 description 2
- 230000015271 coagulation Effects 0.000 description 2
- 238000005345 coagulation Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 239000003779 heat-resistant material Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 230000000171 quenching effect Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004484 Briquette Substances 0.000 description 1
- 241000218645 Cedrus Species 0.000 description 1
- 240000005979 Hordeum vulgare Species 0.000 description 1
- 235000007340 Hordeum vulgare Nutrition 0.000 description 1
- 240000002834 Paulownia tomentosa Species 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000011449 brick Substances 0.000 description 1
- 210000002808 connective tissue Anatomy 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000004482 other powder Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11942082A JPS5913611A (ja) | 1982-07-08 | 1982-07-08 | Ｓｉ↓３Ｎ↓４の超微粉の製造方法ならびに製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11942082A JPS5913611A (ja) | 1982-07-08 | 1982-07-08 | Ｓｉ↓３Ｎ↓４の超微粉の製造方法ならびに製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5913611A true JPS5913611A (ja) | 1984-01-24 |
| JPS6135121B2 JPS6135121B2 (enrdf_load_stackoverflow) | 1986-08-11 |
Family
ID=14761014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11942082A Granted JPS5913611A (ja) | 1982-07-08 | 1982-07-08 | Ｓｉ↓３Ｎ↓４の超微粉の製造方法ならびに製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5913611A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61178408A (ja) * | 1985-02-02 | 1986-08-11 | Toyota Motor Corp | 窒化ケイ素粉末の製造方法 |
| AU568982B2 (en) * | 1985-06-24 | 1988-01-14 | Kawasaki Steel Corp. | Silicon nitride powder |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54132500A (en) * | 1978-04-05 | 1979-10-15 | Toshiba Ceramics Co | Manufacture of silicon nitride powder |
-
1982
- 1982-07-08 JP JP11942082A patent/JPS5913611A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54132500A (en) * | 1978-04-05 | 1979-10-15 | Toshiba Ceramics Co | Manufacture of silicon nitride powder |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61178408A (ja) * | 1985-02-02 | 1986-08-11 | Toyota Motor Corp | 窒化ケイ素粉末の製造方法 |
| AU568982B2 (en) * | 1985-06-24 | 1988-01-14 | Kawasaki Steel Corp. | Silicon nitride powder |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6135121B2 (enrdf_load_stackoverflow) | 1986-08-11 |
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