JPS6135121B2 - - Google Patents

Info

Publication number
JPS6135121B2
JPS6135121B2 JP57119420A JP11942082A JPS6135121B2 JP S6135121 B2 JPS6135121 B2 JP S6135121B2 JP 57119420 A JP57119420 A JP 57119420A JP 11942082 A JP11942082 A JP 11942082A JP S6135121 B2 JPS6135121 B2 JP S6135121B2
Authority
JP
Japan
Prior art keywords
sio
powder
ultrafine
nozzle
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57119420A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5913611A (ja
Inventor
Fumio Hori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP11942082A priority Critical patent/JPS5913611A/ja
Publication of JPS5913611A publication Critical patent/JPS5913611A/ja
Publication of JPS6135121B2 publication Critical patent/JPS6135121B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP11942082A 1982-07-08 1982-07-08 Ｓｉ↓３Ｎ↓４の超微粉の製造方法ならびに製造装置 Granted JPS5913611A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11942082A JPS5913611A (ja) 1982-07-08 1982-07-08 Ｓｉ↓３Ｎ↓４の超微粉の製造方法ならびに製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11942082A JPS5913611A (ja) 1982-07-08 1982-07-08 Ｓｉ↓３Ｎ↓４の超微粉の製造方法ならびに製造装置

Publications (2)

Publication Number Publication Date
JPS5913611A JPS5913611A (ja) 1984-01-24
JPS6135121B2 true JPS6135121B2 (enrdf_load_stackoverflow) 1986-08-11

Family

ID=14761014

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11942082A Granted JPS5913611A (ja) 1982-07-08 1982-07-08 Ｓｉ↓３Ｎ↓４の超微粉の製造方法ならびに製造装置

Country Status (1)

Country Link
JP (1) JPS5913611A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61178408A (ja) * 1985-02-02 1986-08-11 Toyota Motor Corp 窒化ケイ素粉末の製造方法
EP0206795B1 (en) * 1985-06-24 1990-11-14 Kawasaki Steel Corporation Method of producing silicon nitride powders

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54132500A (en) * 1978-04-05 1979-10-15 Toshiba Ceramics Co Manufacture of silicon nitride powder

Also Published As

Publication number Publication date
JPS5913611A (ja) 1984-01-24

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