JPS59107910A - アルゴンガスの精製方法 - Google Patents

アルゴンガスの精製方法

Info

Publication number
JPS59107910A
JPS59107910A JP21546482A JP21546482A JPS59107910A JP S59107910 A JPS59107910 A JP S59107910A JP 21546482 A JP21546482 A JP 21546482A JP 21546482 A JP21546482 A JP 21546482A JP S59107910 A JPS59107910 A JP S59107910A
Authority
JP
Japan
Prior art keywords
argon
molecular sieves
type molecular
bringing
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21546482A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0379288B2 (enrdf_load_stackoverflow
Inventor
Takao Oota
多禾夫 太田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP21546482A priority Critical patent/JPS59107910A/ja
Publication of JPS59107910A publication Critical patent/JPS59107910A/ja
Publication of JPH0379288B2 publication Critical patent/JPH0379288B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP21546482A 1982-12-10 1982-12-10 アルゴンガスの精製方法 Granted JPS59107910A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21546482A JPS59107910A (ja) 1982-12-10 1982-12-10 アルゴンガスの精製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21546482A JPS59107910A (ja) 1982-12-10 1982-12-10 アルゴンガスの精製方法

Publications (2)

Publication Number Publication Date
JPS59107910A true JPS59107910A (ja) 1984-06-22
JPH0379288B2 JPH0379288B2 (enrdf_load_stackoverflow) 1991-12-18

Family

ID=16672803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21546482A Granted JPS59107910A (ja) 1982-12-10 1982-12-10 アルゴンガスの精製方法

Country Status (1)

Country Link
JP (1) JPS59107910A (enrdf_load_stackoverflow)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60239309A (ja) * 1984-05-11 1985-11-28 Seitetsu Kagaku Co Ltd アルゴンの回収方法
DE3621014A1 (de) * 1985-06-28 1987-01-08 Taiyo Sanso Co Ltd Reinigungsvorrichtung fuer argon
JPH01297022A (ja) * 1988-02-05 1989-11-30 Zojirushi Corp 金属製真空二重構造体及びその製造方法
JPH0578108A (ja) * 1991-02-25 1993-03-30 Union Carbide Ind Gases Technol Corp アルゴン精製方法及び装置
JP2007045655A (ja) * 2005-08-09 2007-02-22 Japan Pionics Co Ltd ガスの精製方法及び精製装置
WO2013119883A1 (en) 2012-02-10 2013-08-15 Entegris, Inc. Gas purifier
WO2016062714A1 (en) * 2014-10-20 2016-04-28 Renishaw Plc Additive manufacturing apparatus and methods
CN108069407A (zh) * 2017-12-28 2018-05-25 江西石华精细化工科技协同创新有限公司 一种绝氧气体的脱水除氧方法
WO2019187811A1 (ja) * 2018-03-29 2019-10-03 エア・ウォーター株式会社 精製ガスの製造装置および精製ガスの製造方法
WO2019187810A1 (ja) * 2018-03-27 2019-10-03 エア・ウォーター株式会社 精製ガスの製造装置および精製ガスの製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS506440A (enrdf_load_stackoverflow) * 1973-05-17 1975-01-23
JPS5242755A (en) * 1975-10-01 1977-04-02 Hitachi Ltd Process for measuring displacements on the overall peripheral surface of a cylindrical object by means of moire fringe
JPS53147669A (en) * 1977-05-30 1978-12-22 Daiyo Sanso Removing agent for removing hydrogen* carbon monoxide* oxygen* etc* from mixed gas
JPS5726377A (en) * 1980-07-24 1982-02-12 Nippon Oxygen Co Ltd Production of argon gas

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS506440A (enrdf_load_stackoverflow) * 1973-05-17 1975-01-23
JPS5242755A (en) * 1975-10-01 1977-04-02 Hitachi Ltd Process for measuring displacements on the overall peripheral surface of a cylindrical object by means of moire fringe
JPS53147669A (en) * 1977-05-30 1978-12-22 Daiyo Sanso Removing agent for removing hydrogen* carbon monoxide* oxygen* etc* from mixed gas
JPS5726377A (en) * 1980-07-24 1982-02-12 Nippon Oxygen Co Ltd Production of argon gas

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60239309A (ja) * 1984-05-11 1985-11-28 Seitetsu Kagaku Co Ltd アルゴンの回収方法
DE3621014A1 (de) * 1985-06-28 1987-01-08 Taiyo Sanso Co Ltd Reinigungsvorrichtung fuer argon
JPS623008A (ja) * 1985-06-28 1987-01-09 大陽酸素株式会社 アルゴンの超精製装置、並びに精製方法
JPH01297022A (ja) * 1988-02-05 1989-11-30 Zojirushi Corp 金属製真空二重構造体及びその製造方法
JPH0578108A (ja) * 1991-02-25 1993-03-30 Union Carbide Ind Gases Technol Corp アルゴン精製方法及び装置
JP2007045655A (ja) * 2005-08-09 2007-02-22 Japan Pionics Co Ltd ガスの精製方法及び精製装置
US9694319B2 (en) 2012-02-10 2017-07-04 Entegris, Inc. Gas purifier
WO2013119883A1 (en) 2012-02-10 2013-08-15 Entegris, Inc. Gas purifier
EP3207976A1 (en) 2012-02-10 2017-08-23 Entegris, Inc. Gas purifier
US10245554B2 (en) 2012-02-10 2019-04-02 Entegris, Inc. Gas purifier
WO2016062714A1 (en) * 2014-10-20 2016-04-28 Renishaw Plc Additive manufacturing apparatus and methods
US10632567B2 (en) 2014-10-20 2020-04-28 Renishaw Plc Additive manufacturing apparatus and methods
CN108069407A (zh) * 2017-12-28 2018-05-25 江西石华精细化工科技协同创新有限公司 一种绝氧气体的脱水除氧方法
CN108069407B (zh) * 2017-12-28 2020-11-17 江西石华精细化工科技协同创新有限公司 一种绝氧气体的脱水除氧方法
WO2019187810A1 (ja) * 2018-03-27 2019-10-03 エア・ウォーター株式会社 精製ガスの製造装置および精製ガスの製造方法
JP2019171231A (ja) * 2018-03-27 2019-10-10 エア・ウォーター株式会社 精製ガスの製造装置および精製ガスの製造方法
WO2019187811A1 (ja) * 2018-03-29 2019-10-03 エア・ウォーター株式会社 精製ガスの製造装置および精製ガスの製造方法
JP2019172532A (ja) * 2018-03-29 2019-10-10 エア・ウォーター株式会社 精製ガスの製造装置および精製ガスの製造方法

Also Published As

Publication number Publication date
JPH0379288B2 (enrdf_load_stackoverflow) 1991-12-18

Similar Documents

Publication Publication Date Title
EP0366078B1 (en) Method for Purifying nitrogen trifluoride gas
EP0350656B1 (en) Inert gas purifier especially suited for bulk nitrogen without the use of hydrogen or other reducing gases
US6838066B2 (en) Process for recovery, purification, and recycle of argon
JP3983310B2 (ja) ガス流から二酸化炭素を除去する方法
EP2272815A1 (en) Processes for purification of acetylene
US4156598A (en) Purification of nitrogen trifluoride atmospheres
RU2206499C1 (ru) Способ очистки газообразного трифторида азота
JPH0798648B2 (ja) Ｎｆ３ガスの精製方法
CN101189185A (zh) 三氟化氮的纯化
JP3092101B2 (ja) 純粋でないアルゴンの回収精製方法
JPH10113502A (ja) 高純度液体状態の低温流体を生成する方法および装置
JPS59107910A (ja) アルゴンガスの精製方法
JP2001506960A (ja) 濾過および吸着により極低温流体を精製する方法
US5626033A (en) Process for the recovery of perfluorinated compounds
JPS62119104A (ja) 単結晶製造炉の排ガスより高純度アルゴンを回収する方法
JP2953513B2 (ja) 三フッ化窒素含有混合物から水と亜酸化窒素を除去する方法
JP2005503987A (ja) 臭化水素を精製する方法及び装置
JPH10137530A (ja) 多孔質金属酸化物への吸着による不活性ガスからのｏ２／ｃｏ除去
JP3516716B2 (ja) トリフルオロメタンの精製法
JPH0353017B2 (enrdf_load_stackoverflow)
JPH04925B2 (enrdf_load_stackoverflow)
JP2000117052A (ja) フッ化物の回収方法及び装置
JP2003128412A (ja) 四弗化ケイ素の精製方法
JPH04310509A (ja) 窒素中の不純酸素の除去方法
EP0493347B1 (en) Process for the purification of methane