JPS5893345A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5893345A
JPS5893345A JP56192544A JP19254481A JPS5893345A JP S5893345 A JPS5893345 A JP S5893345A JP 56192544 A JP56192544 A JP 56192544A JP 19254481 A JP19254481 A JP 19254481A JP S5893345 A JPS5893345 A JP S5893345A
Authority
JP
Japan
Prior art keywords
piece
pieces
layer
single crystal
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56192544A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0341984B2 (da
Inventor
Yuji Okuto
奥戸　雄二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56192544A priority Critical patent/JPS5893345A/ja
Publication of JPS5893345A publication Critical patent/JPS5893345A/ja
Publication of JPH0341984B2 publication Critical patent/JPH0341984B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
JP56192544A 1981-11-30 1981-11-30 半導体装置の製造方法 Granted JPS5893345A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56192544A JPS5893345A (ja) 1981-11-30 1981-11-30 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56192544A JPS5893345A (ja) 1981-11-30 1981-11-30 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5893345A true JPS5893345A (ja) 1983-06-03
JPH0341984B2 JPH0341984B2 (da) 1991-06-25

Family

ID=16293038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56192544A Granted JPS5893345A (ja) 1981-11-30 1981-11-30 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5893345A (da)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5948950A (ja) * 1982-09-13 1984-03-21 Agency Of Ind Science & Technol 三次元集積回路構造体の製造方法
JPS6052048A (ja) * 1983-06-27 1985-03-23 テレタイプ　コ−ポレ−シヨン 集積回路デバイスの製作方法
JPS6052047A (ja) * 1983-06-27 1985-03-23 テレタイプ　コ−ポレ−シヨン 集積回路デバイスの製作方法
JPS6052046A (ja) * 1983-06-27 1985-03-23 テレタイプ　コ−ポレ−シヨン 集積回路デバイスの製作方法
JPS62272556A (ja) * 1986-05-20 1987-11-26 Fujitsu Ltd 三次元半導体集積回路装置及びその製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5423484A (en) * 1977-07-25 1979-02-22 Hitachi Ltd Semiconductor integrated circuit and its manufacture

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5423484A (en) * 1977-07-25 1979-02-22 Hitachi Ltd Semiconductor integrated circuit and its manufacture

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5948950A (ja) * 1982-09-13 1984-03-21 Agency Of Ind Science & Technol 三次元集積回路構造体の製造方法
JPS6052048A (ja) * 1983-06-27 1985-03-23 テレタイプ　コ−ポレ−シヨン 集積回路デバイスの製作方法
JPS6052047A (ja) * 1983-06-27 1985-03-23 テレタイプ　コ−ポレ−シヨン 集積回路デバイスの製作方法
JPS6052046A (ja) * 1983-06-27 1985-03-23 テレタイプ　コ−ポレ−シヨン 集積回路デバイスの製作方法
JPS62272556A (ja) * 1986-05-20 1987-11-26 Fujitsu Ltd 三次元半導体集積回路装置及びその製造方法

Also Published As

Publication number Publication date
JPH0341984B2 (da) 1991-06-25

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