JPS5821882A - トンネル形ジヨセフソン接合素子の製造方法 - Google Patents
トンネル形ジヨセフソン接合素子の製造方法Info
- Publication number
- JPS5821882A JPS5821882A JP56121578A JP12157881A JPS5821882A JP S5821882 A JPS5821882 A JP S5821882A JP 56121578 A JP56121578 A JP 56121578A JP 12157881 A JP12157881 A JP 12157881A JP S5821882 A JPS5821882 A JP S5821882A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- barrier layer
- sputtering
- thin film
- tunnel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000010409 thin film Substances 0.000 claims abstract description 23
- 238000000034 method Methods 0.000 claims description 18
- 238000000992 sputter etching Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 abstract description 63
- 230000004888 barrier function Effects 0.000 abstract description 59
- 238000004544 sputter deposition Methods 0.000 abstract description 21
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 10
- 229910052760 oxygen Inorganic materials 0.000 abstract description 10
- 239000001301 oxygen Substances 0.000 abstract description 10
- 230000001590 oxidative effect Effects 0.000 abstract description 6
- 239000000203 mixture Substances 0.000 abstract description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 2
- 229910052593 corundum Inorganic materials 0.000 abstract 2
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 2
- 239000010410 layer Substances 0.000 description 39
- 239000010408 film Substances 0.000 description 17
- 239000000758 substrate Substances 0.000 description 14
- 230000015572 biosynthetic process Effects 0.000 description 13
- 238000005530 etching Methods 0.000 description 11
- 230000003647 oxidation Effects 0.000 description 11
- 238000007254 oxidation reaction Methods 0.000 description 11
- 150000001875 compounds Chemical class 0.000 description 8
- 238000004140 cleaning Methods 0.000 description 6
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 6
- 239000002344 surface layer Substances 0.000 description 6
- 230000001747 exhibiting effect Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000005641 tunneling Effects 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 239000002887 superconductor Substances 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 206010011732 Cyst Diseases 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 101100273965 Solanum lycopersicum HCR9-0 gene Proteins 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 208000031513 cyst Diseases 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 229910021653 sulphate ion Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56121578A JPS5821882A (ja) | 1981-08-03 | 1981-08-03 | トンネル形ジヨセフソン接合素子の製造方法 |
| CA000405292A CA1168762A (en) | 1981-06-22 | 1982-06-16 | Method of fabrication for josephson tunnel junction |
| US06/390,116 US4412902A (en) | 1981-06-22 | 1982-06-18 | Method of fabrication of Josephson tunnel junction |
| FR8211126A FR2508237B1 (fr) | 1981-06-22 | 1982-06-22 | Procede pour la fabrication d'une jonction de josephson, notamment d'une jonction tunnel de josephson |
| NL8202511A NL190858C (nl) | 1981-06-22 | 1982-06-22 | Werkwijze voor het vervaardigen van een Josephson-tunnelovergang. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56121578A JPS5821882A (ja) | 1981-08-03 | 1981-08-03 | トンネル形ジヨセフソン接合素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5821882A true JPS5821882A (ja) | 1983-02-08 |
| JPS6347153B2 JPS6347153B2 (enrdf_load_stackoverflow) | 1988-09-20 |
Family
ID=14814703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56121578A Granted JPS5821882A (ja) | 1981-06-22 | 1981-08-03 | トンネル形ジヨセフソン接合素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5821882A (enrdf_load_stackoverflow) |
-
1981
- 1981-08-03 JP JP56121578A patent/JPS5821882A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6347153B2 (enrdf_load_stackoverflow) | 1988-09-20 |
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