JPS6360555B2 - - Google Patents
Info
- Publication number
- JPS6360555B2 JPS6360555B2 JP56096129A JP9612981A JPS6360555B2 JP S6360555 B2 JPS6360555 B2 JP S6360555B2 JP 56096129 A JP56096129 A JP 56096129A JP 9612981 A JP9612981 A JP 9612981A JP S6360555 B2 JPS6360555 B2 JP S6360555B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- superconductor
- superconductor layer
- josephson junction
- alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010410 layer Substances 0.000 claims description 115
- 239000002887 superconductor Substances 0.000 claims description 60
- 230000004888 barrier function Effects 0.000 claims description 28
- 238000004519 manufacturing process Methods 0.000 claims description 20
- 239000002344 surface layer Substances 0.000 claims description 19
- 229910000838 Al alloy Inorganic materials 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 14
- 238000004544 sputter deposition Methods 0.000 claims description 14
- 229910001257 Nb alloy Inorganic materials 0.000 claims description 6
- 230000003647 oxidation Effects 0.000 claims description 6
- 238000007254 oxidation reaction Methods 0.000 claims description 6
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 description 10
- 239000000758 substrate Substances 0.000 description 10
- 230000001747 exhibiting effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56096129A JPS57211286A (en) | 1981-06-22 | 1981-06-22 | Manufacture of josephson junction element |
| CA000405292A CA1168762A (en) | 1981-06-22 | 1982-06-16 | Method of fabrication for josephson tunnel junction |
| US06/390,116 US4412902A (en) | 1981-06-22 | 1982-06-18 | Method of fabrication of Josephson tunnel junction |
| FR8211126A FR2508237B1 (fr) | 1981-06-22 | 1982-06-22 | Procede pour la fabrication d'une jonction de josephson, notamment d'une jonction tunnel de josephson |
| NL8202511A NL190858C (nl) | 1981-06-22 | 1982-06-22 | Werkwijze voor het vervaardigen van een Josephson-tunnelovergang. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56096129A JPS57211286A (en) | 1981-06-22 | 1981-06-22 | Manufacture of josephson junction element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57211286A JPS57211286A (en) | 1982-12-25 |
| JPS6360555B2 true JPS6360555B2 (enrdf_load_stackoverflow) | 1988-11-24 |
Family
ID=14156770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56096129A Granted JPS57211286A (en) | 1981-06-22 | 1981-06-22 | Manufacture of josephson junction element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57211286A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63100147U (enrdf_load_stackoverflow) * | 1986-12-19 | 1988-06-29 |
-
1981
- 1981-06-22 JP JP56096129A patent/JPS57211286A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63100147U (enrdf_load_stackoverflow) * | 1986-12-19 | 1988-06-29 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57211286A (en) | 1982-12-25 |
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