FR2508237B1 - Procede pour la fabrication d'une jonction de josephson, notamment d'une jonction tunnel de josephson - Google Patents

Procede pour la fabrication d'une jonction de josephson, notamment d'une jonction tunnel de josephson

Info

Publication number
FR2508237B1
FR2508237B1 FR8211126A FR8211126A FR2508237B1 FR 2508237 B1 FR2508237 B1 FR 2508237B1 FR 8211126 A FR8211126 A FR 8211126A FR 8211126 A FR8211126 A FR 8211126A FR 2508237 B1 FR2508237 B1 FR 2508237B1
Authority
FR
France
Prior art keywords
josephson junction
manufacture
tunnel
junction
josephson
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8211126A
Other languages
English (en)
Other versions
FR2508237A1 (fr
Inventor
Osamu Michikami
Yujiro Katoh
Keiichi Tanabe
Hisataka Takenaka
Shizuka Yoshii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP56096129A external-priority patent/JPS57211286A/ja
Priority claimed from JP56105345A external-priority patent/JPS587890A/ja
Priority claimed from JP56121577A external-priority patent/JPS5821881A/ja
Priority claimed from JP56121578A external-priority patent/JPS5821882A/ja
Priority claimed from JP56128439A external-priority patent/JPS5830178A/ja
Priority claimed from JP57024194A external-priority patent/JPS58140172A/ja
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Publication of FR2508237A1 publication Critical patent/FR2508237A1/fr
Application granted granted Critical
Publication of FR2508237B1 publication Critical patent/FR2508237B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/80—Material per se process of making same
    • Y10S505/815—Process of making per se
    • Y10S505/816—Sputtering, including coating, forming, or etching
    • Y10S505/817—Sputtering, including coating, forming, or etching forming josephson element

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
FR8211126A 1981-06-22 1982-06-22 Procede pour la fabrication d'une jonction de josephson, notamment d'une jonction tunnel de josephson Expired FR2508237B1 (fr)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP56096129A JPS57211286A (en) 1981-06-22 1981-06-22 Manufacture of josephson junction element
JP56105345A JPS587890A (ja) 1981-07-06 1981-07-06 トンネル形ジヨセフソン接合素子の製造方法
JP56121577A JPS5821881A (ja) 1981-08-03 1981-08-03 トンネル形ジヨセフソン接合素子の製造方法
JP56121578A JPS5821882A (ja) 1981-08-03 1981-08-03 トンネル形ジヨセフソン接合素子の製造方法
JP56128439A JPS5830178A (ja) 1981-08-17 1981-08-17 トンネル形ジヨセフソン接合素子の製造方法
JP57024194A JPS58140172A (ja) 1982-02-16 1982-02-16 トンネル形ジヨセフソン接合素子の製法

Publications (2)

Publication Number Publication Date
FR2508237A1 FR2508237A1 (fr) 1982-12-24
FR2508237B1 true FR2508237B1 (fr) 1986-08-08

Family

ID=27549155

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8211126A Expired FR2508237B1 (fr) 1981-06-22 1982-06-22 Procede pour la fabrication d'une jonction de josephson, notamment d'une jonction tunnel de josephson

Country Status (4)

Country Link
US (1) US4412902A (fr)
CA (1) CA1168762A (fr)
FR (1) FR2508237B1 (fr)
NL (1) NL190858C (fr)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4608296A (en) * 1983-12-06 1986-08-26 Energy Conversion Devices, Inc. Superconducting films and devices exhibiting AC to DC conversion
US4719120A (en) * 1986-09-29 1988-01-12 The United States Of America As Represented By The Secretary Of The Navy Detection of oxygen in thin films
US4929594A (en) * 1988-03-14 1990-05-29 E. I. Du Pont De Nemours And Company Superconducting composition Tl2 Ba2 CuO6+x and process for manufacture
JP2501118B2 (ja) * 1988-06-17 1996-05-29 忠弘 大見 半導体装置の製造方法
DE68909945T2 (de) * 1988-08-10 1994-03-03 Du Pont Supraleitende metalloxidzusammensetzungen und verfahren zur herstellung.
US5017554A (en) * 1988-08-24 1991-05-21 E. I. Du Pont De Nemours And Company Superconducting metal oxide Tl-Pb-Ca-Sr-Cu-O compositions and processes for manufacture and use
EP0441903A4 (en) * 1988-11-02 1991-12-04 E.I. Du Pont De Nemours And Company Superconducting metal oxide compositions and processes for manufacture and use
DE69026339T2 (de) * 1989-11-13 1996-08-14 Fujitsu Ltd Josephson-Übergang-Apparat
FI950805A (fi) * 1994-02-24 1995-08-25 Shimadzu Corp Suprajohtava tunneliliitos ja menetelmä sen valmistamiseksi
US5783496A (en) * 1996-03-29 1998-07-21 Lam Research Corporation Methods and apparatus for etching self-aligned contacts
US5950104A (en) * 1997-04-09 1999-09-07 Vanguard International Semiconductor Corporation Contact process using Y-contact etching
US6165910A (en) * 1997-12-29 2000-12-26 Lam Research Corporation Self-aligned contacts for semiconductor device
US6133153A (en) * 1998-03-30 2000-10-17 Lam Research Corporation Self-aligned contacts for semiconductor device
US7042043B2 (en) 2001-08-30 2006-05-09 Micron Technology, Inc. Programmable array logic or memory devices with asymmetrical tunnel barriers
US7135734B2 (en) * 2001-08-30 2006-11-14 Micron Technology, Inc. Graded composition metal oxide tunnel barrier interpoly insulators
US6963103B2 (en) 2001-08-30 2005-11-08 Micron Technology, Inc. SRAM cells with repressed floating gate memory, low tunnel barrier interpoly insulators
US7476925B2 (en) 2001-08-30 2009-01-13 Micron Technology, Inc. Atomic layer deposition of metal oxide and/or low asymmetrical tunnel barrier interploy insulators
US7068544B2 (en) 2001-08-30 2006-06-27 Micron Technology, Inc. Flash memory with low tunnel barrier interpoly insulators
US6778441B2 (en) 2001-08-30 2004-08-17 Micron Technology, Inc. Integrated circuit memory device and method
US6754108B2 (en) 2001-08-30 2004-06-22 Micron Technology, Inc. DRAM cells with repressed floating gate memory, low tunnel barrier interpoly insulators
US7132711B2 (en) 2001-08-30 2006-11-07 Micron Technology, Inc. Programmable array logic or memory with p-channel devices and asymmetrical tunnel barriers
US7075829B2 (en) 2001-08-30 2006-07-11 Micron Technology, Inc. Programmable memory address and decode circuits with low tunnel barrier interpoly insulators
US7087954B2 (en) 2001-08-30 2006-08-08 Micron Technology, Inc. In service programmable logic arrays with low tunnel barrier interpoly insulators
US6784480B2 (en) * 2002-02-12 2004-08-31 Micron Technology, Inc. Asymmetric band-gap engineered nonvolatile memory device
US7221586B2 (en) 2002-07-08 2007-05-22 Micron Technology, Inc. Memory utilizing oxide nanolaminates
US20040191697A1 (en) * 2003-03-24 2004-09-30 Communications Research Laboratory Method for processing a niobium type thin film and method for manufacturing a superconducting integrated circuit
US7097745B2 (en) * 2003-06-27 2006-08-29 Seagate Technology, Llc Method of forming a tunneling magnetoresistive head
US7099143B1 (en) * 2005-05-24 2006-08-29 Avx Corporation Wet electrolytic capacitors
US7927948B2 (en) 2005-07-20 2011-04-19 Micron Technology, Inc. Devices with nanocrystals and methods of formation
US7480130B2 (en) 2006-03-09 2009-01-20 Avx Corporation Wet electrolytic capacitor
US7511943B2 (en) 2006-03-09 2009-03-31 Avx Corporation Wet electrolytic capacitor containing a cathode coating
US7615385B2 (en) 2006-09-20 2009-11-10 Hypres, Inc Double-masking technique for increasing fabrication yield in superconducting electronics
US7760487B2 (en) * 2007-10-22 2010-07-20 Avx Corporation Doped ceramic powder for use in forming capacitor anodes
US7768773B2 (en) * 2008-01-22 2010-08-03 Avx Corporation Sintered anode pellet etched with an organic acid for use in an electrolytic capacitor
US7852615B2 (en) * 2008-01-22 2010-12-14 Avx Corporation Electrolytic capacitor anode treated with an organometallic compound
US7760488B2 (en) * 2008-01-22 2010-07-20 Avx Corporation Sintered anode pellet treated with a surfactant for use in an electrolytic capacitor
US8203827B2 (en) * 2009-02-20 2012-06-19 Avx Corporation Anode for a solid electrolytic capacitor containing a non-metallic surface treatment
US10367134B2 (en) 2017-06-07 2019-07-30 International Business Machines Corporation Shadow mask sidewall tunnel junction for quantum computing
CN113517386B (zh) * 2020-08-06 2022-05-31 阿里巴巴集团控股有限公司 约瑟夫森结、约瑟夫森结的制备方法、装置及超导电路

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5588382A (en) * 1978-12-27 1980-07-04 Fujitsu Ltd Preparation of tunnel junction type josephson element

Also Published As

Publication number Publication date
NL190858C (nl) 1994-09-16
US4412902A (en) 1983-11-01
FR2508237A1 (fr) 1982-12-24
CA1168762A (fr) 1984-06-05
NL8202511A (nl) 1983-01-17
NL190858B (nl) 1994-04-18

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Legal Events

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TP Transmission of property
CA Change of address