JPS58186966A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS58186966A
JPS58186966A JP57069041A JP6904182A JPS58186966A JP S58186966 A JPS58186966 A JP S58186966A JP 57069041 A JP57069041 A JP 57069041A JP 6904182 A JP6904182 A JP 6904182A JP S58186966 A JPS58186966 A JP S58186966A
Authority
JP
Japan
Prior art keywords
region
opening
insulating film
type
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57069041A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0139225B2 (enrdf_load_stackoverflow
Inventor
Kazumi Suzuki
一美 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP57069041A priority Critical patent/JPS58186966A/ja
Publication of JPS58186966A publication Critical patent/JPS58186966A/ja
Publication of JPH0139225B2 publication Critical patent/JPH0139225B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D18/00—Thyristors
    • H10D18/01—Manufacture or treatment
    • H10D18/031—Manufacture or treatment of lateral or planar thyristors

Landscapes

  • Bipolar Transistors (AREA)
  • Thyristors (AREA)
JP57069041A 1982-04-23 1982-04-23 半導体装置の製造方法 Granted JPS58186966A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57069041A JPS58186966A (ja) 1982-04-23 1982-04-23 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57069041A JPS58186966A (ja) 1982-04-23 1982-04-23 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS58186966A true JPS58186966A (ja) 1983-11-01
JPH0139225B2 JPH0139225B2 (enrdf_load_stackoverflow) 1989-08-18

Family

ID=13391101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57069041A Granted JPS58186966A (ja) 1982-04-23 1982-04-23 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS58186966A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62158364A (ja) * 1986-01-07 1987-07-14 Toshiba Corp プレ−ナ型サイリスタの製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5040078A (enrdf_load_stackoverflow) * 1973-08-15 1975-04-12
JPS5076992A (enrdf_load_stackoverflow) * 1973-11-07 1975-06-24

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5040078A (enrdf_load_stackoverflow) * 1973-08-15 1975-04-12
JPS5076992A (enrdf_load_stackoverflow) * 1973-11-07 1975-06-24

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62158364A (ja) * 1986-01-07 1987-07-14 Toshiba Corp プレ−ナ型サイリスタの製造方法

Also Published As

Publication number Publication date
JPH0139225B2 (enrdf_load_stackoverflow) 1989-08-18

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