JPS5814043B2 - 湿度センサ素子 - Google Patents
湿度センサ素子Info
- Publication number
- JPS5814043B2 JPS5814043B2 JP54070608A JP7060879A JPS5814043B2 JP S5814043 B2 JPS5814043 B2 JP S5814043B2 JP 54070608 A JP54070608 A JP 54070608A JP 7060879 A JP7060879 A JP 7060879A JP S5814043 B2 JPS5814043 B2 JP S5814043B2
- Authority
- JP
- Japan
- Prior art keywords
- humidity sensor
- sensor element
- humidity
- resistance value
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910044991 metal oxide Inorganic materials 0.000 claims description 8
- 150000004706 metal oxides Chemical class 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 8
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 8
- 238000005259 measurement Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 238000001354 calcination Methods 0.000 description 2
- 238000010298 pulverizing process Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000002075 main ingredient Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/04—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having negative temperature coefficient
- H01C7/042—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having negative temperature coefficient mainly consisting of inorganic non-metallic substances
- H01C7/043—Oxides or oxidic compounds
- H01C7/047—Vanadium oxides or oxidic compounds, e.g. VOx
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Ceramic Engineering (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Structural Engineering (AREA)
- Materials Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Organic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Electromagnetism (AREA)
- Manufacturing & Machinery (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54070608A JPS5814043B2 (ja) | 1979-06-07 | 1979-06-07 | 湿度センサ素子 |
DE19803020138 DE3020138A1 (de) | 1979-06-07 | 1980-05-27 | Feuchtigkeitsanzeigeelement |
US06/156,192 US4344062A (en) | 1979-06-07 | 1980-06-03 | Humidity sensor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54070608A JPS5814043B2 (ja) | 1979-06-07 | 1979-06-07 | 湿度センサ素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55163801A JPS55163801A (en) | 1980-12-20 |
JPS5814043B2 true JPS5814043B2 (ja) | 1983-03-17 |
Family
ID=13436463
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54070608A Expired JPS5814043B2 (ja) | 1979-06-07 | 1979-06-07 | 湿度センサ素子 |
Country Status (3)
Country | Link |
---|---|
US (1) | US4344062A (US20020095090A1-20020718-M00002.png) |
JP (1) | JPS5814043B2 (US20020095090A1-20020718-M00002.png) |
DE (1) | DE3020138A1 (US20020095090A1-20020718-M00002.png) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61291220A (ja) * | 1985-06-20 | 1986-12-22 | Tomekichi Nakamura | 農工運搬用油圧式動力伝達作動正逆回転駆動装置 |
JPS628833A (ja) * | 1985-07-05 | 1987-01-16 | Tomekichi Nakamura | 農工運搬車用変速機付正逆転駆動装置 |
US10899599B2 (en) | 2012-06-15 | 2021-01-26 | Dolby Laboratories Licensing Corporation | Systems and methods for controlling dual modulation displays |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5897801A (ja) * | 1981-12-07 | 1983-06-10 | 株式会社豊田中央研究所 | 感湿素子 |
JPS5996701A (ja) * | 1982-11-25 | 1984-06-04 | ティーディーケイ株式会社 | 感湿素子材料 |
GB8322418D0 (en) * | 1983-08-19 | 1983-09-21 | Emi Ltd | Humidity sensor |
US5871684A (en) * | 1997-07-17 | 1999-02-16 | Hughes Electronics Corporation | Method of making lightweight, low thermal expansion microwave structures |
US7256542B2 (en) * | 2004-02-20 | 2007-08-14 | Au Optronics Corporation | Method and device for detecting moisture in electroluminescence display devices |
US7726213B2 (en) * | 2006-05-11 | 2010-06-01 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Opto-mechanical tilt and inertial force sensor |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1037175B (de) * | 1954-07-24 | 1958-08-21 | British Scient Instr Res Ass | Feuchtigkeitsmesseinrichtung mit einem keramischen Halbleiter und Verfahren zu seiner Herstellung |
US3721631A (en) * | 1971-08-16 | 1973-03-20 | Shinyei Kaisha | Humidity sensors comprising alkalimetal oxide,divanadium pentoxide and silicon |
US3748625A (en) * | 1972-01-06 | 1973-07-24 | Thunder Scient Corp | Moisture sensing element and method of making same |
US4015230A (en) * | 1975-02-03 | 1977-03-29 | Matsushita Electric Industrial Co., Ltd. | Humidity sensitive ceramic resistor |
-
1979
- 1979-06-07 JP JP54070608A patent/JPS5814043B2/ja not_active Expired
-
1980
- 1980-05-27 DE DE19803020138 patent/DE3020138A1/de active Granted
- 1980-06-03 US US06/156,192 patent/US4344062A/en not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61291220A (ja) * | 1985-06-20 | 1986-12-22 | Tomekichi Nakamura | 農工運搬用油圧式動力伝達作動正逆回転駆動装置 |
JPS628833A (ja) * | 1985-07-05 | 1987-01-16 | Tomekichi Nakamura | 農工運搬車用変速機付正逆転駆動装置 |
US10899599B2 (en) | 2012-06-15 | 2021-01-26 | Dolby Laboratories Licensing Corporation | Systems and methods for controlling dual modulation displays |
Also Published As
Publication number | Publication date |
---|---|
DE3020138C2 (US20020095090A1-20020718-M00002.png) | 1982-12-16 |
DE3020138A1 (de) | 1980-12-18 |
US4344062A (en) | 1982-08-10 |
JPS55163801A (en) | 1980-12-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5814043B2 (ja) | 湿度センサ素子 | |
JPH08162302A (ja) | サーミスタとその製造方法 | |
JPH022534B2 (US20020095090A1-20020718-M00002.png) | ||
JPS6214921B2 (US20020095090A1-20020718-M00002.png) | ||
JPS58201057A (ja) | ガス検知素子 | |
JPH0447658Y2 (US20020095090A1-20020718-M00002.png) | ||
JPS6011441B2 (ja) | 感湿素子 | |
JPS59123B2 (ja) | 湿度検知素子の製造方法 | |
JPS5843894B2 (ja) | 湿度検知素子の製造方法 | |
JPS6351363B2 (US20020095090A1-20020718-M00002.png) | ||
JPS5811082B2 (ja) | 温度湿度検出素子 | |
JPH11132980A (ja) | 炭化水素ガス検知素子 | |
JPH03118459A (ja) | 排ガスセンサ | |
JPS6351364B2 (US20020095090A1-20020718-M00002.png) | ||
JPS6355845B2 (US20020095090A1-20020718-M00002.png) | ||
JPS5835901A (ja) | 感湿素子 | |
JPH02132803A (ja) | 湿度センサ | |
JPS6318841B2 (US20020095090A1-20020718-M00002.png) | ||
JPH05196591A (ja) | 湿度センサ | |
JPS5849820B2 (ja) | 酸素ガスセンサ− | |
JPH05119009A (ja) | 湿度センサ | |
JPS587041B2 (ja) | 相対湿度用感湿抵抗素子 | |
JPH05119010A (ja) | 湿度センサ | |
JPS5846699B2 (ja) | ガス感知素子 | |
JP2003128463A (ja) | 電気伝導性酸化物並びに電気伝導性酸化物を用いて構成したセンサー |