JPS58108774A - 薄膜トランジスタの製造方法 - Google Patents

薄膜トランジスタの製造方法

Info

Publication number
JPS58108774A
JPS58108774A JP56207736A JP20773681A JPS58108774A JP S58108774 A JPS58108774 A JP S58108774A JP 56207736 A JP56207736 A JP 56207736A JP 20773681 A JP20773681 A JP 20773681A JP S58108774 A JPS58108774 A JP S58108774A
Authority
JP
Japan
Prior art keywords
semiconductor
film
forming
source
semiconductor film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56207736A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354476B2 (enFirst
Inventor
Kanetaka Sekiguchi
金孝 関口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Holdings Co Ltd
Citizen Watch Co Ltd
Original Assignee
Citizen Holdings Co Ltd
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Holdings Co Ltd, Citizen Watch Co Ltd filed Critical Citizen Holdings Co Ltd
Priority to JP56207736A priority Critical patent/JPS58108774A/ja
Priority to GB08221029A priority patent/GB2107115B/en
Publication of JPS58108774A publication Critical patent/JPS58108774A/ja
Priority to US06/621,324 priority patent/US4502204A/en
Publication of JPH0354476B2 publication Critical patent/JPH0354476B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/031—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
    • H10D30/0312—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] characterised by the gate electrodes
    • H10D30/0314—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] characterised by the gate electrodes of lateral top-gate TFTs comprising only a single gate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/6737—Thin-film transistors [TFT] characterised by the electrodes characterised by the electrode materials
    • H10D30/6739—Conductor-insulator-semiconductor electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/031—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
    • H10D30/0321—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon

Landscapes

  • Formation Of Insulating Films (AREA)
JP56207736A 1981-07-17 1981-12-22 薄膜トランジスタの製造方法 Granted JPS58108774A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP56207736A JPS58108774A (ja) 1981-12-22 1981-12-22 薄膜トランジスタの製造方法
GB08221029A GB2107115B (en) 1981-07-17 1982-07-19 Method of manufacturing insulated gate thin film effect transitors
US06/621,324 US4502204A (en) 1981-07-17 1984-06-15 Method of manufacturing insulated gate thin film field effect transistors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56207736A JPS58108774A (ja) 1981-12-22 1981-12-22 薄膜トランジスタの製造方法

Publications (2)

Publication Number Publication Date
JPS58108774A true JPS58108774A (ja) 1983-06-28
JPH0354476B2 JPH0354476B2 (enFirst) 1991-08-20

Family

ID=16544683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56207736A Granted JPS58108774A (ja) 1981-07-17 1981-12-22 薄膜トランジスタの製造方法

Country Status (1)

Country Link
JP (1) JPS58108774A (enFirst)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9960281B2 (en) 2015-02-09 2018-05-01 The Hong Kong University Of Science And Technology Metal oxide thin film transistor with source and drain regions doped at room temperature

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS526087A (en) * 1975-06-30 1977-01-18 Ibm Insb semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS526087A (en) * 1975-06-30 1977-01-18 Ibm Insb semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9960281B2 (en) 2015-02-09 2018-05-01 The Hong Kong University Of Science And Technology Metal oxide thin film transistor with source and drain regions doped at room temperature

Also Published As

Publication number Publication date
JPH0354476B2 (enFirst) 1991-08-20

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