JPS5792858A - Semiconductor integrated circuit device and manufacture thereof - Google Patents

Semiconductor integrated circuit device and manufacture thereof

Info

Publication number
JPS5792858A
JPS5792858A JP55168044A JP16804480A JPS5792858A JP S5792858 A JPS5792858 A JP S5792858A JP 55168044 A JP55168044 A JP 55168044A JP 16804480 A JP16804480 A JP 16804480A JP S5792858 A JPS5792858 A JP S5792858A
Authority
JP
Japan
Prior art keywords
layer
sio
elements
oxidation
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55168044A
Other languages
English (en)
Inventor
Akira Muramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55168044A priority Critical patent/JPS5792858A/ja
Priority to FR8117485A priority patent/FR2495379A1/fr
Priority to GB8129016A priority patent/GB2088627B/en
Priority to IT25073/81A priority patent/IT1139738B/it
Priority to DE19813146779 priority patent/DE3146779A1/de
Priority to US06/326,278 priority patent/US4502201A/en
Publication of JPS5792858A publication Critical patent/JPS5792858A/ja
Priority to HK435/86A priority patent/HK43586A/xx
Priority to MY603/86A priority patent/MY8600603A/xx
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8222—Bipolar technology
    • H01L21/8228—Complementary devices, e.g. complementary transistors
    • H01L21/82285—Complementary vertical transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
    • H01L21/76205—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO in a region being recessed from the surface, e.g. in a recess, groove, tub or trench region
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/0203—Particular design considerations for integrated circuits
    • H01L27/0214—Particular design considerations for integrated circuits for internal polarisation, e.g. I2L
    • H01L27/0229—Particular design considerations for integrated circuits for internal polarisation, e.g. I2L of bipolar structures
    • H01L27/0233—Integrated injection logic structures [I2L]
    • H01L27/0244—I2L structures integrated in combination with analog structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/082—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including bipolar components only
    • H01L27/0823—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including bipolar components only including vertical bipolar transistors only
    • H01L27/0828—Combination of direct and inverse vertical transistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Element Separation (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
JP55168044A 1980-12-01 1980-12-01 Semiconductor integrated circuit device and manufacture thereof Pending JPS5792858A (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP55168044A JPS5792858A (en) 1980-12-01 1980-12-01 Semiconductor integrated circuit device and manufacture thereof
FR8117485A FR2495379A1 (fr) 1980-12-01 1981-09-16 Circuit integre a semiconducteurs et procede de fabrication de ce dernier
GB8129016A GB2088627B (en) 1980-12-01 1981-09-25 Semiconductor integrated circuit device and fabrication method thereof
IT25073/81A IT1139738B (it) 1980-12-01 1981-11-13 Dispositivi a circuito integrato a semiconduttori e procedimento per la sua fabbricazione
DE19813146779 DE3146779A1 (de) 1980-12-01 1981-11-25 Integrierte halbleiterschaltung und verfahren zu ihrer herstellung
US06/326,278 US4502201A (en) 1980-12-01 1981-12-01 Semiconductor integrated circuit device and fabrication method thereof
HK435/86A HK43586A (en) 1980-12-01 1986-06-09 Semiconductor integrated circuit device and fabrication method thereof
MY603/86A MY8600603A (en) 1980-12-01 1986-12-30 Semiconductor integrated circuit device and fabrication method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55168044A JPS5792858A (en) 1980-12-01 1980-12-01 Semiconductor integrated circuit device and manufacture thereof

Publications (1)

Publication Number Publication Date
JPS5792858A true JPS5792858A (en) 1982-06-09

Family

ID=15860776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55168044A Pending JPS5792858A (en) 1980-12-01 1980-12-01 Semiconductor integrated circuit device and manufacture thereof

Country Status (8)

Country Link
US (1) US4502201A (ja)
JP (1) JPS5792858A (ja)
DE (1) DE3146779A1 (ja)
FR (1) FR2495379A1 (ja)
GB (1) GB2088627B (ja)
HK (1) HK43586A (ja)
IT (1) IT1139738B (ja)
MY (1) MY8600603A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58210283A (ja) * 1982-05-31 1983-12-07 トステム株式会社 連段窓改装における旧窓枠除去方法
JPS58210281A (ja) * 1982-05-31 1983-12-07 トステム株式会社 連段窓改装における旧窓枠除去方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4797372A (en) * 1985-11-01 1989-01-10 Texas Instruments Incorporated Method of making a merge bipolar and complementary metal oxide semiconductor transistor device
US5023690A (en) * 1986-10-24 1991-06-11 Texas Instruments Incorporated Merged bipolar and complementary metal oxide semiconductor transistor device
EP0309788A1 (de) * 1987-09-30 1989-04-05 Siemens Aktiengesellschaft Verfahren zur Erzeugung eines versenkten Oxids
JP2005116973A (ja) * 2003-10-10 2005-04-28 Seiko Epson Corp 半導体装置の製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3962717A (en) * 1974-10-29 1976-06-08 Fairchild Camera And Instrument Corporation Oxide isolated integrated injection logic with selective guard ring
DE2455347A1 (de) * 1974-11-22 1976-05-26 Itt Ind Gmbh Deutsche Monolithisch integrierte festkoerperschaltung und herstellungsverfahren
FR2352403A1 (fr) * 1976-05-20 1977-12-16 Comp Generale Electricite Circuit integre rapide
US4157268A (en) * 1977-06-16 1979-06-05 International Business Machines Corporation Localized oxidation enhancement for an integrated injection logic circuit
DE2835632A1 (de) * 1978-08-14 1980-02-28 Bosch Gmbh Robert Monolithisch integrierte schaltung und verfahren zu ihrer herstellung
DE3020609C2 (de) * 1979-05-31 1985-11-07 Tokyo Shibaura Denki K.K., Kawasaki, Kanagawa Verfahren zum Herstellen einer integrierten Schaltung mit wenigstens einem I↑2↑L-Element
JPS5696852A (en) * 1979-12-29 1981-08-05 Fujitsu Ltd Semiconductor device
DE3029013A1 (de) * 1980-07-31 1982-02-25 Robert Bosch Gmbh, 7000 Stuttgart Hochintegrierte, monolithische halbleiterschaltung

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58210283A (ja) * 1982-05-31 1983-12-07 トステム株式会社 連段窓改装における旧窓枠除去方法
JPS58210281A (ja) * 1982-05-31 1983-12-07 トステム株式会社 連段窓改装における旧窓枠除去方法
JPH0323709B2 (ja) * 1982-05-31 1991-03-29 Kuriin Kaiso Kk

Also Published As

Publication number Publication date
MY8600603A (en) 1986-12-31
GB2088627B (en) 1985-01-03
HK43586A (en) 1986-06-20
IT8125073A0 (it) 1981-11-13
GB2088627A (en) 1982-06-09
US4502201A (en) 1985-03-05
DE3146779A1 (de) 1982-09-09
IT1139738B (it) 1986-09-24
FR2495379A1 (fr) 1982-06-04

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