JPS5787164A - Manufacture of semiconductor memory storage - Google Patents

Manufacture of semiconductor memory storage

Info

Publication number
JPS5787164A
JPS5787164A JP55163932A JP16393280A JPS5787164A JP S5787164 A JPS5787164 A JP S5787164A JP 55163932 A JP55163932 A JP 55163932A JP 16393280 A JP16393280 A JP 16393280A JP S5787164 A JPS5787164 A JP S5787164A
Authority
JP
Japan
Prior art keywords
gate
wafting
blanking
gates
regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55163932A
Other languages
English (en)
Japanese (ja)
Other versions
JPS623991B2 (enrdf_load_stackoverflow
Inventor
Fujio Masuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP55163932A priority Critical patent/JPS5787164A/ja
Priority to DE8181305349T priority patent/DE3175125D1/de
Priority to EP81305349A priority patent/EP0052982B1/en
Priority to US06/321,322 priority patent/US4803529A/en
Publication of JPS5787164A publication Critical patent/JPS5787164A/ja
Publication of JPS623991B2 publication Critical patent/JPS623991B2/ja
Priority to US07/193,079 priority patent/US4910565A/en
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
JP55163932A 1980-11-20 1980-11-20 Manufacture of semiconductor memory storage Granted JPS5787164A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP55163932A JPS5787164A (en) 1980-11-20 1980-11-20 Manufacture of semiconductor memory storage
DE8181305349T DE3175125D1 (en) 1980-11-20 1981-11-11 Semiconductor memory device and method for manufacturing the same
EP81305349A EP0052982B1 (en) 1980-11-20 1981-11-11 Semiconductor memory device and method for manufacturing the same
US06/321,322 US4803529A (en) 1980-11-20 1981-11-13 Electrically erasable and electrically programmable read only memory
US07/193,079 US4910565A (en) 1980-11-20 1988-05-12 Electrically erasable and electrically programmable read-only memory

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55163932A JPS5787164A (en) 1980-11-20 1980-11-20 Manufacture of semiconductor memory storage

Publications (2)

Publication Number Publication Date
JPS5787164A true JPS5787164A (en) 1982-05-31
JPS623991B2 JPS623991B2 (enrdf_load_stackoverflow) 1987-01-28

Family

ID=15783558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55163932A Granted JPS5787164A (en) 1980-11-20 1980-11-20 Manufacture of semiconductor memory storage

Country Status (1)

Country Link
JP (1) JPS5787164A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52106275A (en) * 1976-03-03 1977-09-06 Nec Corp Floating type nonvoltile semiconductor memory element
JPS5513901A (en) * 1978-07-17 1980-01-31 Hitachi Ltd Fixed memory of semiconductor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52106275A (en) * 1976-03-03 1977-09-06 Nec Corp Floating type nonvoltile semiconductor memory element
JPS5513901A (en) * 1978-07-17 1980-01-31 Hitachi Ltd Fixed memory of semiconductor

Also Published As

Publication number Publication date
JPS623991B2 (enrdf_load_stackoverflow) 1987-01-28

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