JPS5776879A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5776879A
JPS5776879A JP55152088A JP15208880A JPS5776879A JP S5776879 A JPS5776879 A JP S5776879A JP 55152088 A JP55152088 A JP 55152088A JP 15208880 A JP15208880 A JP 15208880A JP S5776879 A JPS5776879 A JP S5776879A
Authority
JP
Japan
Prior art keywords
semiconductor layer
property
layer
semi
forms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55152088A
Other languages
English (en)
Japanese (ja)
Other versions
JPH024140B2 (enEXAMPLES
Inventor
Tadashi Fukuzawa
Ken Yamaguchi
Susumu Takahashi
Hisao Nakajima
Michiharu Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55152088A priority Critical patent/JPS5776879A/ja
Priority to DE8181109124T priority patent/DE3166512D1/de
Priority to EP81109124A priority patent/EP0051271B1/en
Publication of JPS5776879A publication Critical patent/JPS5776879A/ja
Priority to US06/935,171 priority patent/US4772925A/en
Publication of JPH024140B2 publication Critical patent/JPH024140B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/40—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
    • H10D30/47—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having 2D charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
    • H10D30/471—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT]
    • H10D30/473—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having confinement of carriers by multiple heterojunctions, e.g. quantum well HEMT
    • H10D30/4732—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having confinement of carriers by multiple heterojunctions, e.g. quantum well HEMT using Group III-V semiconductor material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/351—Substrate regions of field-effect devices
    • H10D62/357—Substrate regions of field-effect devices of FETs

Landscapes

  • Junction Field-Effect Transistors (AREA)
  • Bipolar Transistors (AREA)
JP55152088A 1980-10-31 1980-10-31 Semiconductor device Granted JPS5776879A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP55152088A JPS5776879A (en) 1980-10-31 1980-10-31 Semiconductor device
DE8181109124T DE3166512D1 (en) 1980-10-31 1981-10-28 Heterojunction semiconductor device
EP81109124A EP0051271B1 (en) 1980-10-31 1981-10-28 Heterojunction semiconductor device
US06/935,171 US4772925A (en) 1980-10-31 1986-11-26 High speed switching field effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55152088A JPS5776879A (en) 1980-10-31 1980-10-31 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5776879A true JPS5776879A (en) 1982-05-14
JPH024140B2 JPH024140B2 (enEXAMPLES) 1990-01-26

Family

ID=15532779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55152088A Granted JPS5776879A (en) 1980-10-31 1980-10-31 Semiconductor device

Country Status (4)

Country Link
US (1) US4772925A (enEXAMPLES)
EP (1) EP0051271B1 (enEXAMPLES)
JP (1) JPS5776879A (enEXAMPLES)
DE (1) DE3166512D1 (enEXAMPLES)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59103389A (ja) * 1982-12-04 1984-06-14 Nippon Telegr & Teleph Corp <Ntt> 超伝導素子及びその製法
JPS59228768A (ja) * 1983-06-11 1984-12-22 Agency Of Ind Science & Technol 半導体集積回路
JPS613464A (ja) * 1984-06-18 1986-01-09 Hitachi Ltd 半導体装置
JPS6147681A (ja) * 1984-07-31 1986-03-08 アメリカン　テレフォン　アンド　テレグラフ　カムパニー 可変禁制帯デバイス
JPS61131565A (ja) * 1984-11-30 1986-06-19 Fujitsu Ltd 電界効果型半導体装置
JP2002330904A (ja) * 2001-05-07 2002-11-19 Kowa Co Ltd 電気掃除機用吸込口の回転ロータ

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4633282A (en) * 1982-10-04 1986-12-30 Rockwell International Corporation Metal-semiconductor field-effect transistor with a partial p-type drain
JPH0810751B2 (ja) * 1983-12-23 1996-01-31 株式会社日立製作所 半導体装置
GB2166286B (en) * 1984-10-26 1988-07-20 Stc Plc Photo-detectors
US4652896A (en) * 1985-06-27 1987-03-24 The United States Of America As Represented By The Secretary Of The Air Force Modulation doped GaAs/AlGaAs field effect transistor
EP0264932A1 (en) * 1986-10-24 1988-04-27 Sumitomo Electric Industries Limited Field effect transistor
US4855797A (en) * 1987-07-06 1989-08-08 Siemens Corporate Research And Support, Inc. Modulation doped high electron mobility transistor with n-i-p-i structure
US4839310A (en) * 1988-01-27 1989-06-13 Massachusetts Institute Of Technology High mobility transistor with opposed-gates
US5177026A (en) * 1989-05-29 1993-01-05 Mitsubishi Denki Kabushiki Kaisha Method for producing a compound semiconductor MIS FET
US4987463A (en) * 1989-08-28 1991-01-22 Motorola, Inc. FET having a high trap concentration interface layer
JP2822547B2 (ja) * 1990-03-06 1998-11-11 富士通株式会社 高電子移動度トランジスタ
TW354411B (en) * 1996-09-27 1999-03-11 Sanyo Electric Co Semiconductor device and its manufacturing process
JP3705431B2 (ja) * 2002-03-28 2005-10-12 ユーディナデバイス株式会社 半導体装置及びその製造方法
JP4389935B2 (ja) * 2004-09-30 2009-12-24 サンケン電気株式会社 半導体装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53126282A (en) * 1977-04-08 1978-11-04 Thomson Csf Fet transistor
US4157556A (en) * 1977-01-06 1979-06-05 Varian Associates, Inc. Heterojunction confinement field effect transistor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2725180A1 (de) * 1977-06-03 1978-12-07 Sollich Spezialmasch Vorrichtung zum behandeln von kakaobutter enthaltenden massen
GB2012480A (en) * 1978-01-12 1979-07-25 Plessey Co Ltd Heterostructure field effect transistors
US4194935A (en) * 1978-04-24 1980-03-25 Bell Telephone Laboratories, Incorporated Method of making high mobility multilayered heterojunction devices employing modulated doping
DE3072175D1 (de) * 1979-12-28 1990-04-26 Fujitsu Ltd Halbleitervorrichtungen mit heterouebergang.

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4157556A (en) * 1977-01-06 1979-06-05 Varian Associates, Inc. Heterojunction confinement field effect transistor
JPS53126282A (en) * 1977-04-08 1978-11-04 Thomson Csf Fet transistor

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59103389A (ja) * 1982-12-04 1984-06-14 Nippon Telegr & Teleph Corp <Ntt> 超伝導素子及びその製法
JPS59228768A (ja) * 1983-06-11 1984-12-22 Agency Of Ind Science & Technol 半導体集積回路
JPS613464A (ja) * 1984-06-18 1986-01-09 Hitachi Ltd 半導体装置
US5831296A (en) * 1984-06-18 1998-11-03 Hitachi, Ltd. Semiconductor device
JPS6147681A (ja) * 1984-07-31 1986-03-08 アメリカン　テレフォン　アンド　テレグラフ　カムパニー 可変禁制帯デバイス
JPS61131565A (ja) * 1984-11-30 1986-06-19 Fujitsu Ltd 電界効果型半導体装置
JP2002330904A (ja) * 2001-05-07 2002-11-19 Kowa Co Ltd 電気掃除機用吸込口の回転ロータ

Also Published As

Publication number Publication date
EP0051271A1 (en) 1982-05-12
US4772925A (en) 1988-09-20
JPH024140B2 (enEXAMPLES) 1990-01-26
DE3166512D1 (en) 1984-11-08
EP0051271B1 (en) 1984-10-03

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