JPS5773025A - Apparatus for continuous vacuum treatment - Google Patents
Apparatus for continuous vacuum treatmentInfo
- Publication number
- JPS5773025A JPS5773025A JP14946180A JP14946180A JPS5773025A JP S5773025 A JPS5773025 A JP S5773025A JP 14946180 A JP14946180 A JP 14946180A JP 14946180 A JP14946180 A JP 14946180A JP S5773025 A JPS5773025 A JP S5773025A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- chamber
- rolls
- roll
- ripple
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14946180A JPS5773025A (en) | 1980-10-27 | 1980-10-27 | Apparatus for continuous vacuum treatment |
GB8122981A GB2084264B (en) | 1980-07-30 | 1981-07-24 | Continuous vacuum treating apparatus |
NL8103566A NL8103566A (nl) | 1980-07-30 | 1981-07-28 | Doorlopende vacuumbehandelingsinrichting. |
DE3129997A DE3129997C2 (de) | 1980-07-30 | 1981-07-29 | Kontinuierlich arbeitende Plasma-Vakuumbehandlungsvorrichtung |
FR818114782A FR2487696B1 (fr) | 1980-07-30 | 1981-07-29 | Appareil de traitement continu sous vide |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14946180A JPS5773025A (en) | 1980-10-27 | 1980-10-27 | Apparatus for continuous vacuum treatment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5773025A true JPS5773025A (en) | 1982-05-07 |
JPS6153377B2 JPS6153377B2 (ja) | 1986-11-17 |
Family
ID=15475625
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14946180A Granted JPS5773025A (en) | 1980-07-30 | 1980-10-27 | Apparatus for continuous vacuum treatment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5773025A (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57195754A (en) * | 1981-05-29 | 1982-12-01 | Shin Etsu Chem Co Ltd | Continuous vacuum treatment apparatus |
JPS60944A (ja) * | 1983-06-17 | 1985-01-07 | Hitachi Ltd | 真空連続処理装置 |
JPS6112867A (ja) * | 1984-06-27 | 1986-01-21 | Hitachi Ltd | ロール式シール装置 |
JPS62169830A (ja) * | 1986-01-22 | 1987-07-27 | Matsushita Electric Works Ltd | 真空シ−ル装置 |
JPS6457614A (en) * | 1987-04-27 | 1989-03-03 | American Telephone & Telegraph | Vacuum sealing method and vacuum sealer |
JPH01240657A (ja) * | 1988-03-18 | 1989-09-26 | Kawasaki Steel Corp | 差圧シール装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04135461U (ja) * | 1991-06-12 | 1992-12-16 | 積水化成品工業株式会社 | 切り花等の輸送ケース |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5730733A (en) * | 1980-07-30 | 1982-02-19 | Shin Etsu Chem Co Ltd | Device for continuous plasma treatment |
-
1980
- 1980-10-27 JP JP14946180A patent/JPS5773025A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5730733A (en) * | 1980-07-30 | 1982-02-19 | Shin Etsu Chem Co Ltd | Device for continuous plasma treatment |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57195754A (en) * | 1981-05-29 | 1982-12-01 | Shin Etsu Chem Co Ltd | Continuous vacuum treatment apparatus |
JPH0153294B2 (ja) * | 1981-05-29 | 1989-11-13 | Shinetsu Kagaku Kogyo Kk | |
JPS60944A (ja) * | 1983-06-17 | 1985-01-07 | Hitachi Ltd | 真空連続処理装置 |
JPH0455214B2 (ja) * | 1983-06-17 | 1992-09-02 | Hitachi Seisakusho Kk | |
JPS6112867A (ja) * | 1984-06-27 | 1986-01-21 | Hitachi Ltd | ロール式シール装置 |
JPS62169830A (ja) * | 1986-01-22 | 1987-07-27 | Matsushita Electric Works Ltd | 真空シ−ル装置 |
JPS6457614A (en) * | 1987-04-27 | 1989-03-03 | American Telephone & Telegraph | Vacuum sealing method and vacuum sealer |
JPH01240657A (ja) * | 1988-03-18 | 1989-09-26 | Kawasaki Steel Corp | 差圧シール装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6153377B2 (ja) | 1986-11-17 |
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