GB2084264B - Continuous vacuum treating apparatus - Google Patents

Continuous vacuum treating apparatus

Info

Publication number
GB2084264B
GB2084264B GB8122981A GB8122981A GB2084264B GB 2084264 B GB2084264 B GB 2084264B GB 8122981 A GB8122981 A GB 8122981A GB 8122981 A GB8122981 A GB 8122981A GB 2084264 B GB2084264 B GB 2084264B
Authority
GB
United Kingdom
Prior art keywords
treating apparatus
continuous vacuum
vacuum treating
continuous
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8122981A
Other versions
GB2084264A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP10363080A external-priority patent/JPS5730733A/en
Priority claimed from JP14946180A external-priority patent/JPS5773025A/en
Application filed by Shin Etsu Chemical Co Ltd, Hitachi Ltd filed Critical Shin Etsu Chemical Co Ltd
Publication of GB2084264A publication Critical patent/GB2084264A/en
Application granted granted Critical
Publication of GB2084264B publication Critical patent/GB2084264B/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/168—Sealings between relatively-moving surfaces which permits material to be continuously conveyed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C37/0089—Sealing devices placed between articles and treatment installations during moulding or shaping, e.g. sealing off the entrance or exit of ovens or irradiation rooms, connections between rooms at different pressures
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4409—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber characterised by sealing means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
    • H01J37/32761—Continuous moving
    • H01J37/3277—Continuous moving of continuous material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32788—Means for moving the material to be treated for extracting the material from the process chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32899—Multiple chambers, e.g. cluster tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
GB8122981A 1980-07-30 1981-07-24 Continuous vacuum treating apparatus Expired GB2084264B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10363080A JPS5730733A (en) 1980-07-30 1980-07-30 Device for continuous plasma treatment
JP14946180A JPS5773025A (en) 1980-10-27 1980-10-27 Apparatus for continuous vacuum treatment

Publications (2)

Publication Number Publication Date
GB2084264A GB2084264A (en) 1982-04-07
GB2084264B true GB2084264B (en) 1984-04-26

Family

ID=26444251

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8122981A Expired GB2084264B (en) 1980-07-30 1981-07-24 Continuous vacuum treating apparatus

Country Status (4)

Country Link
DE (1) DE3129997C2 (en)
FR (1) FR2487696B1 (en)
GB (1) GB2084264B (en)
NL (1) NL8103566A (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4511419A (en) * 1982-04-23 1985-04-16 Firma Erwin Kampf Gmbh & Co. Method and device for laminating foils
EP0130444B1 (en) * 1983-06-17 1987-09-23 Hitachi, Ltd. Continuous vacuum treating apparatus
DE3415012A1 (en) * 1984-04-19 1986-01-09 BMP Plasmatechnologie GmbH, 8011 Heimstetten Process and appliance for the continuous working of substrates using low-pressure plasma
US4812101A (en) * 1987-04-27 1989-03-14 American Telephone And Telegraph Company, At&T Bell Laboratories Method and apparatus for continuous throughput in a vacuum environment
EP0527859B1 (en) * 1990-05-10 1995-07-19 Eastman Kodak Company Apparatus for-plasma treatment of continuous material
US5110396A (en) * 1990-06-14 1992-05-05 The Langston Corporation Floating air seal for an apparatus for manufacturing single faced corrugated board
EP0989455A1 (en) * 1998-09-22 2000-03-29 Agfa-Gevaert N.V. An apparatus for the continuous treatment of sheet material under reduced pressure
US6250222B1 (en) 1998-09-22 2001-06-26 Agfa-Gevaert Apparatus for the continuous treatment of sheet material under reduced pressure
DE19903935A1 (en) * 1999-02-01 2000-08-03 Bosch Gmbh Robert Method and device for sterilizing vessels or objects
ES2336870B1 (en) 2007-08-20 2011-02-18 Novogenio, S.L. SYSTEM AND PROCEDURE FOR EMPTY AND CONTINUOUS COATING OF A BAND-FORMED MATERIAL.
DE102011100257A1 (en) * 2011-05-03 2013-01-03 Maschinenbau Scholz Gmbh & Co Kg Variable gasket for CV pipe
EP3771747B1 (en) 2019-08-01 2022-11-30 Vereinigung zur Förderung des Instituts für Kunststoffverarbeitung in Industrie und Handwerk An der Rhein.- Westf. Technischen Hochschule Method and system for continuous vacuum-based processing of web material
CN113737149A (en) * 2020-05-28 2021-12-03 宝山钢铁股份有限公司 Continuous vacuum coating sealing lock for metal strip
WO2024052712A1 (en) * 2022-09-05 2024-03-14 Arcelormittal Sealing airlock for deposition chamber

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2384500A (en) * 1942-07-08 1945-09-11 Crown Cork & Seal Co Apparatus and method of coating
DE961771C (en) * 1954-06-27 1957-04-11 Ernst Tuescher Dr Sealing device for the ongoing passage of conveyed material, such as tapes, nets, threads, from one room of a certain pressure into a room of another pressure
US2853047A (en) * 1954-12-23 1958-09-23 Vac Anstalt Installations for continuously treating strip-like materials in vacuum
US3032890A (en) * 1958-03-28 1962-05-08 Continental Can Co Sealing structures for treating chambers
FR1488202A (en) * 1962-05-18 1967-07-13 Crompton & Knowles Corp Caulking of pressure vessels
US3326177A (en) * 1963-09-12 1967-06-20 Pennsalt Chemicals Corp Metal vapor coating apparatus
DE1279426B (en) * 1966-08-24 1968-10-03 Leybold Heraeus Gmbh & Co Kg Tape evaporation device
DE1911120A1 (en) * 1968-03-08 1969-12-18 Galileo Spa Off Method and device for semi-continuous metallizing of web or thread-like material
DD94794A1 (en) * 1972-03-20 1973-01-12
DE2249333C3 (en) * 1972-10-07 1978-10-05 Hoechst Ag, 6000 Frankfurt Sealing device for the continuous infeed and outfeed of textile webs on high pressure dampers
US4013539A (en) * 1973-01-12 1977-03-22 Coulter Information Systems, Inc. Thin film deposition apparatus
GB1461412A (en) * 1973-07-16 1977-01-13 Ici Ltd Seal
GB1451704A (en) * 1974-06-28 1976-10-06 Head Wrightson & Co Ltd Strip cooling
US3959104A (en) * 1974-09-30 1976-05-25 Surface Activation Corporation Electrode structure for generating electrical discharge plasma

Also Published As

Publication number Publication date
GB2084264A (en) 1982-04-07
DE3129997C2 (en) 1983-12-29
NL8103566A (en) 1982-02-16
DE3129997A1 (en) 1982-04-01
FR2487696A1 (en) 1982-02-05
FR2487696B1 (en) 1991-06-14

Similar Documents

Publication Publication Date Title
GB2084037B (en) Processing apparatus
IE810358L (en) Conveyor apparatus
GB2102583B (en) Combination-weighing apparatus
JPS56163621A (en) Vacuum cleaning apparatus
GB2083201B (en) Cab-heating apparatus
DE3466414D1 (en) Continuous vacuum treating apparatus
JPS57143562A (en) Surface treating apparatus
GB2084264B (en) Continuous vacuum treating apparatus
GB2076608B (en) Moving object apparatus
DE3162994D1 (en) Fluid-settling apparatus
SG30485G (en) Controlled-torque apparatus
DE3168756D1 (en) Polisher-finer apparatus
GB2071833B (en) Vacuum drying apparatus
JPS57117851A (en) Dental treating apparatus
JPS5752440A (en) Hemadinamometer apparatus
JPS56117200A (en) Irradiating apparatus
DE3162729D1 (en) Drawing apparatus
DE3167280D1 (en) Magnetic treatment apparatus
GB2088228B (en) Fodder-mixing apparatus
DE3066131D1 (en) Thermo-imaging apparatus
JPS5695049A (en) Fingerrpressure apparatus
JPS5729655A (en) Wet treating apparatus
ZA811779B (en) Drawing apparatus
JPS55145906A (en) Garbage treating apparatus
GB2075895B (en) Apparatus for flame-scarfing

Legal Events

Date Code Title Description
PE20 Patent expired after termination of 20 years

Effective date: 20010723