JPS57195754A - Continuous vacuum treatment apparatus - Google Patents

Continuous vacuum treatment apparatus

Info

Publication number
JPS57195754A
JPS57195754A JP8236081A JP8236081A JPS57195754A JP S57195754 A JPS57195754 A JP S57195754A JP 8236081 A JP8236081 A JP 8236081A JP 8236081 A JP8236081 A JP 8236081A JP S57195754 A JPS57195754 A JP S57195754A
Authority
JP
Japan
Prior art keywords
vacuum
vacuum treatment
treatment
sealing mechanism
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8236081A
Other languages
Japanese (ja)
Other versions
JPH0153294B2 (en
Inventor
Susumu Ueno
Hideaki Kamata
Kiyoshi Imada
Yoshitada Hata
Masaya Tokai
Kenichi Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Hitachi Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP8236081A priority Critical patent/JPS57195754A/en
Publication of JPS57195754A publication Critical patent/JPS57195754A/en
Publication of JPH0153294B2 publication Critical patent/JPH0153294B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To provide effective industrial means by the titled apparatus for performing a plasma treatment, sputtering treatment, etc. on a plastics, wherein respective vacuum treatment tanks can conduct independently different treatments on a workpiece, for example, formation of a plurality of different layers on the object surface, by arranging a plurality of vacuum treatment tanks with a sealing mechanism therebetween for intercepting them.
CONSTITUTION: The continuous vacuum treatment apparatus is composed of vacuum treatment tanks 101, 102 for continuously performing a plasma treatment, etc. on a flexible workpiece F under a vacuum, the sealing mechanism 4 for intercepting them, and preliminary vacuum chambers 2, 3 positioned respectively before and after them. In an embodiment, a vinyl chloride resin film (the workpiece F) is delivered from a payoff 8 to the preliminary vacuum chamber 2 into the vacuum treatment tank 101 where it is exposed to an atmosphere containing argon, then is passed via the sealing mechanism 4 into the vacuum treatment tank 102 where it is subjected again to another plasma treatment in the presence of an organic gas such as an amine monomer. Thereafter it is wound onto a winder 9 positioned downstream.
COPYRIGHT: (C)1982,JPO&Japio
JP8236081A 1981-05-29 1981-05-29 Continuous vacuum treatment apparatus Granted JPS57195754A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8236081A JPS57195754A (en) 1981-05-29 1981-05-29 Continuous vacuum treatment apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8236081A JPS57195754A (en) 1981-05-29 1981-05-29 Continuous vacuum treatment apparatus

Publications (2)

Publication Number Publication Date
JPS57195754A true JPS57195754A (en) 1982-12-01
JPH0153294B2 JPH0153294B2 (en) 1989-11-13

Family

ID=13772406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8236081A Granted JPS57195754A (en) 1981-05-29 1981-05-29 Continuous vacuum treatment apparatus

Country Status (1)

Country Link
JP (1) JPS57195754A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60224780A (en) * 1984-04-20 1985-11-09 Kuraray Co Ltd Sealing device in continuous vacuum treating device for sheet-shaped material
JPS6112867A (en) * 1984-06-27 1986-01-21 Hitachi Ltd Roll type sealing device
US4763601A (en) * 1987-09-02 1988-08-16 Nippon Steel Corporation Continuous composite coating apparatus for coating strip
KR100880352B1 (en) 2007-06-01 2009-01-23 (주) 에이알티 Flexible film sputter system having film pass port for inflow prevention of gas

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50161475A (en) * 1974-06-20 1975-12-27
JPS5730733A (en) * 1980-07-30 1982-02-19 Shin Etsu Chem Co Ltd Device for continuous plasma treatment
JPS5773025A (en) * 1980-10-27 1982-05-07 Shin Etsu Chem Co Ltd Apparatus for continuous vacuum treatment

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50161475A (en) * 1974-06-20 1975-12-27
JPS5730733A (en) * 1980-07-30 1982-02-19 Shin Etsu Chem Co Ltd Device for continuous plasma treatment
JPS5773025A (en) * 1980-10-27 1982-05-07 Shin Etsu Chem Co Ltd Apparatus for continuous vacuum treatment

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60224780A (en) * 1984-04-20 1985-11-09 Kuraray Co Ltd Sealing device in continuous vacuum treating device for sheet-shaped material
JPS6112867A (en) * 1984-06-27 1986-01-21 Hitachi Ltd Roll type sealing device
US4763601A (en) * 1987-09-02 1988-08-16 Nippon Steel Corporation Continuous composite coating apparatus for coating strip
EP0305573B1 (en) * 1987-09-03 1993-07-28 Nippon Steel Corporation Continuous composite coating apparatus for coating strip
KR100880352B1 (en) 2007-06-01 2009-01-23 (주) 에이알티 Flexible film sputter system having film pass port for inflow prevention of gas

Also Published As

Publication number Publication date
JPH0153294B2 (en) 1989-11-13

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