JPS57195753A - Batch-wise continuous type vacuum treatment apparatus - Google Patents
Batch-wise continuous type vacuum treatment apparatusInfo
- Publication number
- JPS57195753A JPS57195753A JP8235881A JP8235881A JPS57195753A JP S57195753 A JPS57195753 A JP S57195753A JP 8235881 A JP8235881 A JP 8235881A JP 8235881 A JP8235881 A JP 8235881A JP S57195753 A JPS57195753 A JP S57195753A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- treatment
- chamber
- vacuum chamber
- tanks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE: To make the titled apparatus for performing a plasma treatment, sputtering treatment, etc. on a plastics possible to conduct a batch-wise continuous vacuum treatment, by arranging, before and after vacuum treatment tanks, preliminary vacuum chambers each having a sealing mechanism, and further arranging, before these apparatus, a vacuum chamber including a payoff, and after said apparatuses, a vacuum chamber including a winder.
CONSTITUTION: A preliminary vacuum chamber 2 having a pair of upper and lower sealing rolls is positioned before the vacuum treatment tank 101 for continuously performing a surface treatment on a flexible workpiece F under a vacuum, and a preliminary vacuum chamber 3 similar to the chamber 2 is positioned after the vacuum treatment tank 102 having the same function as that of the tank 101, both the tanks 101, 102 being evacuated via exhaust pipes 5, 6. After the completion of treatment, the vacuum in the vacuum chamber 103 including a payoff and the vacuum chamber 104 including a winding is released, the treated workpiece is taken out from the chamber 104 while a next workpiece is put into the chamber 103. Then again the both chambers are evacuated to be prepared for the next treatment. In this arrangement, since the vacuum treatment tanks 101, 102 are kept vacuum, batches can be continuously treated with less waiting period.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8235881A JPS57195753A (en) | 1981-05-29 | 1981-05-29 | Batch-wise continuous type vacuum treatment apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8235881A JPS57195753A (en) | 1981-05-29 | 1981-05-29 | Batch-wise continuous type vacuum treatment apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57195753A true JPS57195753A (en) | 1982-12-01 |
| JPS648650B2 JPS648650B2 (en) | 1989-02-14 |
Family
ID=13772352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8235881A Granted JPS57195753A (en) | 1981-05-29 | 1981-05-29 | Batch-wise continuous type vacuum treatment apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57195753A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4763601A (en) * | 1987-09-02 | 1988-08-16 | Nippon Steel Corporation | Continuous composite coating apparatus for coating strip |
| JPS6465259A (en) * | 1987-09-04 | 1989-03-10 | Nippon Steel Corp | Continuous composite coating equipment for band plate |
-
1981
- 1981-05-29 JP JP8235881A patent/JPS57195753A/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4763601A (en) * | 1987-09-02 | 1988-08-16 | Nippon Steel Corporation | Continuous composite coating apparatus for coating strip |
| EP0305573B1 (en) * | 1987-09-03 | 1993-07-28 | Nippon Steel Corporation | Continuous composite coating apparatus for coating strip |
| JPS6465259A (en) * | 1987-09-04 | 1989-03-10 | Nippon Steel Corp | Continuous composite coating equipment for band plate |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS648650B2 (en) | 1989-02-14 |
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