JPS57195746A - Continuous vacuum treatment apparatus - Google Patents

Continuous vacuum treatment apparatus

Info

Publication number
JPS57195746A
JPS57195746A JP56080900A JP8090081A JPS57195746A JP S57195746 A JPS57195746 A JP S57195746A JP 56080900 A JP56080900 A JP 56080900A JP 8090081 A JP8090081 A JP 8090081A JP S57195746 A JPS57195746 A JP S57195746A
Authority
JP
Japan
Prior art keywords
vacuum
chamber
workpiece
attraction
treatment apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56080900A
Other languages
Japanese (ja)
Inventor
Kiyoshi Imada
Susumu Ueno
Hideaki Kamata
Masaya Tokai
Yoshitada Hata
Kenichi Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Hitachi Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP56080900A priority Critical patent/JPS57195746A/en
Publication of JPS57195746A publication Critical patent/JPS57195746A/en
Pending legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)

Abstract

PURPOSE: To prevent attraction of workpiece into exhaust vent at the start of a vacuum pump to evacuate a preliminary vacuum chamber, by installing an attraction inhibiting plate.
CONSTITUTION: A workpiece to be vacuum treated is set across preliminary vacuum chambers 2, 3 and a vacuum treating chamber 1 and the chambers are evacuated via exhaust vent 20 by means of vacuum pump 4, 6. An attraction inhibiting plate 21 prevents the set workpiece from being drawn into the vent 20 and maintains a good vacuum in the preliminary vacuum chamber, because the air in said chamber is exhausted through a gap between the plate 21 and the exhaust vent 20.
COPYRIGHT: (C)1982,JPO&Japio
JP56080900A 1981-05-29 1981-05-29 Continuous vacuum treatment apparatus Pending JPS57195746A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56080900A JPS57195746A (en) 1981-05-29 1981-05-29 Continuous vacuum treatment apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56080900A JPS57195746A (en) 1981-05-29 1981-05-29 Continuous vacuum treatment apparatus

Publications (1)

Publication Number Publication Date
JPS57195746A true JPS57195746A (en) 1982-12-01

Family

ID=13731236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56080900A Pending JPS57195746A (en) 1981-05-29 1981-05-29 Continuous vacuum treatment apparatus

Country Status (1)

Country Link
JP (1) JPS57195746A (en)

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