JPS56166377A - Plasma treating method of hollow body - Google Patents

Plasma treating method of hollow body

Info

Publication number
JPS56166377A
JPS56166377A JP6863180A JP6863180A JPS56166377A JP S56166377 A JPS56166377 A JP S56166377A JP 6863180 A JP6863180 A JP 6863180A JP 6863180 A JP6863180 A JP 6863180A JP S56166377 A JPS56166377 A JP S56166377A
Authority
JP
Japan
Prior art keywords
hollow body
vessel
plasma
vacuum
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6863180A
Other languages
Japanese (ja)
Inventor
Yoichi Mikami
Noboru Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Chemical Co Ltd
Original Assignee
Sekisui Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Chemical Co Ltd filed Critical Sekisui Chemical Co Ltd
Priority to JP6863180A priority Critical patent/JPS56166377A/en
Publication of JPS56166377A publication Critical patent/JPS56166377A/en
Pending legal-status Critical Current

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  • ing And Chemical Polishing (AREA)

Abstract

PURPOSE: To uniformly treat by plasma the inside surface of a hollow body with good efficiency by feeding monomer and carrier gases into the hollow body consisting of a material of small dielectric losses, and acting high frequencies through the hollow body.
CONSTITUTION: A vacuum vessel 1 made of glass is exhausted with a vacuum pump, so that the inside of the chamber 1 is evacuated down to a required degree of vacuum. Next, a carrier gas is supplied through a gas supply pipe 3 and a monomer gas through a gas supply pipe 4, at suitable flow speeds, and high frequencies are applied from a power source 9 via a matching device 8 to a disclike electrode 5 provided in proximity to the outside bottom surface of a vessel 2 consisting of, for example, polystyrene having small dielectric loss, or the like, and a bandlike electrode 6 provided to the outside surface in the neck part of the chamber 1, whereby plasma treatment is accomplished. In this way, the inner surface of the vessel 2 is coated uniformly with a plasma polymer. This method is also adaptable to large- sized products.
COPYRIGHT: (C)1981,JPO&Japio
JP6863180A 1980-05-22 1980-05-22 Plasma treating method of hollow body Pending JPS56166377A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6863180A JPS56166377A (en) 1980-05-22 1980-05-22 Plasma treating method of hollow body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6863180A JPS56166377A (en) 1980-05-22 1980-05-22 Plasma treating method of hollow body

Publications (1)

Publication Number Publication Date
JPS56166377A true JPS56166377A (en) 1981-12-21

Family

ID=13379273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6863180A Pending JPS56166377A (en) 1980-05-22 1980-05-22 Plasma treating method of hollow body

Country Status (1)

Country Link
JP (1) JPS56166377A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100971370B1 (en) * 2003-08-12 2010-07-20 주성엔지니어링(주) Radio frequency power supplier for generating uniform and large-size plasma
CZ305156B6 (en) * 2013-12-19 2015-05-20 Masarykova Univerzita Plasma treatment of internal and/or external surface of a hollow, electrically non-conducting body and apparatus for making the same
JP2015129310A (en) * 2013-11-26 2015-07-16 泉工業株式会社 Inner wall processing method and device for container
WO2024142377A1 (en) * 2022-12-28 2024-07-04 日新電機株式会社 Film removal device and film removal method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100971370B1 (en) * 2003-08-12 2010-07-20 주성엔지니어링(주) Radio frequency power supplier for generating uniform and large-size plasma
JP2015129310A (en) * 2013-11-26 2015-07-16 泉工業株式会社 Inner wall processing method and device for container
CZ305156B6 (en) * 2013-12-19 2015-05-20 Masarykova Univerzita Plasma treatment of internal and/or external surface of a hollow, electrically non-conducting body and apparatus for making the same
WO2024142377A1 (en) * 2022-12-28 2024-07-04 日新電機株式会社 Film removal device and film removal method

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