JPS5275183A - Method and apparatus for washing of treating objects - Google Patents

Method and apparatus for washing of treating objects

Info

Publication number
JPS5275183A
JPS5275183A JP15127875A JP15127875A JPS5275183A JP S5275183 A JPS5275183 A JP S5275183A JP 15127875 A JP15127875 A JP 15127875A JP 15127875 A JP15127875 A JP 15127875A JP S5275183 A JPS5275183 A JP S5275183A
Authority
JP
Japan
Prior art keywords
washing
treating objects
objects
emiconductor
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15127875A
Other languages
Japanese (ja)
Inventor
Haruhiko Abe
Akira Nishimoto
Kuniaki Miyake
Yumiko Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP15127875A priority Critical patent/JPS5275183A/en
Publication of JPS5275183A publication Critical patent/JPS5275183A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: To remove surface deposit films within a short time and clean the surfaces by immersing objects to be treated such as emiconductor substrates or carbon plates in gas plasmas and simultaneously heating them from the outside.
COPYRIGHT: (C)1977,JPO&Japio
JP15127875A 1975-12-18 1975-12-18 Method and apparatus for washing of treating objects Pending JPS5275183A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15127875A JPS5275183A (en) 1975-12-18 1975-12-18 Method and apparatus for washing of treating objects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15127875A JPS5275183A (en) 1975-12-18 1975-12-18 Method and apparatus for washing of treating objects

Publications (1)

Publication Number Publication Date
JPS5275183A true JPS5275183A (en) 1977-06-23

Family

ID=15515172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15127875A Pending JPS5275183A (en) 1975-12-18 1975-12-18 Method and apparatus for washing of treating objects

Country Status (1)

Country Link
JP (1) JPS5275183A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5496506A (en) * 1992-09-21 1996-03-05 Sony Corporation Process for removing fine particles
US5500393A (en) * 1990-05-21 1996-03-19 Sumitomo Electric Industries, Ltd. Method for fabricating a schottky junction
US6520189B1 (en) 1986-09-09 2003-02-18 Semiconductor Energy Laboratory Co., Ltd. CVD apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6520189B1 (en) 1986-09-09 2003-02-18 Semiconductor Energy Laboratory Co., Ltd. CVD apparatus
US5500393A (en) * 1990-05-21 1996-03-19 Sumitomo Electric Industries, Ltd. Method for fabricating a schottky junction
US5496506A (en) * 1992-09-21 1996-03-05 Sony Corporation Process for removing fine particles
US5628954A (en) * 1992-09-21 1997-05-13 Sony Corporation Process for detecting fine particles

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