JPS5275183A - Method and apparatus for washing of treating objects - Google Patents
Method and apparatus for washing of treating objectsInfo
- Publication number
- JPS5275183A JPS5275183A JP15127875A JP15127875A JPS5275183A JP S5275183 A JPS5275183 A JP S5275183A JP 15127875 A JP15127875 A JP 15127875A JP 15127875 A JP15127875 A JP 15127875A JP S5275183 A JPS5275183 A JP S5275183A
- Authority
- JP
- Japan
- Prior art keywords
- washing
- treating objects
- objects
- emiconductor
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To remove surface deposit films within a short time and clean the surfaces by immersing objects to be treated such as emiconductor substrates or carbon plates in gas plasmas and simultaneously heating them from the outside.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15127875A JPS5275183A (en) | 1975-12-18 | 1975-12-18 | Method and apparatus for washing of treating objects |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15127875A JPS5275183A (en) | 1975-12-18 | 1975-12-18 | Method and apparatus for washing of treating objects |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5275183A true JPS5275183A (en) | 1977-06-23 |
Family
ID=15515172
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15127875A Pending JPS5275183A (en) | 1975-12-18 | 1975-12-18 | Method and apparatus for washing of treating objects |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5275183A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5496506A (en) * | 1992-09-21 | 1996-03-05 | Sony Corporation | Process for removing fine particles |
US5500393A (en) * | 1990-05-21 | 1996-03-19 | Sumitomo Electric Industries, Ltd. | Method for fabricating a schottky junction |
US6520189B1 (en) | 1986-09-09 | 2003-02-18 | Semiconductor Energy Laboratory Co., Ltd. | CVD apparatus |
-
1975
- 1975-12-18 JP JP15127875A patent/JPS5275183A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6520189B1 (en) | 1986-09-09 | 2003-02-18 | Semiconductor Energy Laboratory Co., Ltd. | CVD apparatus |
US5500393A (en) * | 1990-05-21 | 1996-03-19 | Sumitomo Electric Industries, Ltd. | Method for fabricating a schottky junction |
US5496506A (en) * | 1992-09-21 | 1996-03-05 | Sony Corporation | Process for removing fine particles |
US5628954A (en) * | 1992-09-21 | 1997-05-13 | Sony Corporation | Process for detecting fine particles |
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