JPS544245A - Washing equipment - Google Patents
Washing equipmentInfo
- Publication number
- JPS544245A JPS544245A JP7013377A JP7013377A JPS544245A JP S544245 A JPS544245 A JP S544245A JP 7013377 A JP7013377 A JP 7013377A JP 7013377 A JP7013377 A JP 7013377A JP S544245 A JPS544245 A JP S544245A
- Authority
- JP
- Japan
- Prior art keywords
- washing
- washing equipment
- cascade
- substraate
- effluent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
PURPOSE: To economically obtain the greatest effect, in a short time, of washing a semiconductor substraate or the like surface treated with chemicals, by primarily washing the substrate with effluent of a cascade washing vessel, followed by cascade washing.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7013377A JPS6038865B2 (en) | 1977-06-13 | 1977-06-13 | Water washing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7013377A JPS6038865B2 (en) | 1977-06-13 | 1977-06-13 | Water washing equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS544245A true JPS544245A (en) | 1979-01-12 |
JPS6038865B2 JPS6038865B2 (en) | 1985-09-03 |
Family
ID=13422753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7013377A Expired JPS6038865B2 (en) | 1977-06-13 | 1977-06-13 | Water washing equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6038865B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5787530U (en) * | 1980-11-17 | 1982-05-29 | ||
JPS6054763A (en) * | 1983-09-05 | 1985-03-29 | Matsushita Electric Ind Co Ltd | Coating device |
-
1977
- 1977-06-13 JP JP7013377A patent/JPS6038865B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5787530U (en) * | 1980-11-17 | 1982-05-29 | ||
JPS6054763A (en) * | 1983-09-05 | 1985-03-29 | Matsushita Electric Ind Co Ltd | Coating device |
Also Published As
Publication number | Publication date |
---|---|
JPS6038865B2 (en) | 1985-09-03 |
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