JPS544245A - Washing equipment - Google Patents

Washing equipment

Info

Publication number
JPS544245A
JPS544245A JP7013377A JP7013377A JPS544245A JP S544245 A JPS544245 A JP S544245A JP 7013377 A JP7013377 A JP 7013377A JP 7013377 A JP7013377 A JP 7013377A JP S544245 A JPS544245 A JP S544245A
Authority
JP
Japan
Prior art keywords
washing
washing equipment
cascade
substraate
effluent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7013377A
Other languages
Japanese (ja)
Other versions
JPS6038865B2 (en
Inventor
Hiroshi Koshimizu
Tatsuji Akazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7013377A priority Critical patent/JPS6038865B2/en
Publication of JPS544245A publication Critical patent/JPS544245A/en
Publication of JPS6038865B2 publication Critical patent/JPS6038865B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

PURPOSE: To economically obtain the greatest effect, in a short time, of washing a semiconductor substraate or the like surface treated with chemicals, by primarily washing the substrate with effluent of a cascade washing vessel, followed by cascade washing.
COPYRIGHT: (C)1979,JPO&Japio
JP7013377A 1977-06-13 1977-06-13 Water washing equipment Expired JPS6038865B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7013377A JPS6038865B2 (en) 1977-06-13 1977-06-13 Water washing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7013377A JPS6038865B2 (en) 1977-06-13 1977-06-13 Water washing equipment

Publications (2)

Publication Number Publication Date
JPS544245A true JPS544245A (en) 1979-01-12
JPS6038865B2 JPS6038865B2 (en) 1985-09-03

Family

ID=13422753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7013377A Expired JPS6038865B2 (en) 1977-06-13 1977-06-13 Water washing equipment

Country Status (1)

Country Link
JP (1) JPS6038865B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5787530U (en) * 1980-11-17 1982-05-29
JPS6054763A (en) * 1983-09-05 1985-03-29 Matsushita Electric Ind Co Ltd Coating device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5787530U (en) * 1980-11-17 1982-05-29
JPS6054763A (en) * 1983-09-05 1985-03-29 Matsushita Electric Ind Co Ltd Coating device

Also Published As

Publication number Publication date
JPS6038865B2 (en) 1985-09-03

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